COMPOSITION AND STRUCTURE OF BORON-NITRIDE FILMS DEPOSITED BY CHEMICAL VAPOR-DEPOSITION FROM BORAZINE

被引：0
|
作者：
KOUVETAKIS, J
PATEL, VV
MILLER, CW
BEACH, DB
机构：
来源：
JOURNAL OF VACUUM SCIENCE & TECHNOLOGY A-VACUUM SURFACES AND FILMS | 1990年 / 8卷 / 06期
关键词：
D O I：
暂无
中图分类号：
TB3 [工程材料学];
学科分类号：
0805 ; 080502 ;
摘要：
引用
收藏
页码：3928 / 3933
页数：6
相关论文
共 50 条
  • [1] CHEMICAL VAPOR-DEPOSITION OF BORON-NITRIDE
    PATIBANDLA, N
    LUTHRA, KL
    JOURNAL OF THE ELECTROCHEMICAL SOCIETY, 1992, 139 (12) : 3558 - 3565
  • [2] BORON-NITRIDE COMPOSITES BY CHEMICAL VAPOR-DEPOSITION
    PIERSON, HO
    JOURNAL OF COMPOSITE MATERIALS, 1975, 9 (JUL) : 228 - 240
  • [3] CHEMICAL VAPOR-DEPOSITION OF BORON AND BORON-NITRIDE FROM DECABORANE(14)
    KIM, YG
    DOWBEN, PA
    SPENCER, JT
    RAMSEYER, GO
    JOURNAL OF VACUUM SCIENCE & TECHNOLOGY A-VACUUM SURFACES AND FILMS, 1989, 7 (04): : 2796 - 2798
  • [4] SIMULTANEOUS CHEMICAL VAPOR-DEPOSITION OF BORON-NITRIDE AND ALUMINUM NITRIDE
    LEE, WY
    LACKEY, WJ
    AGRAWAL, PK
    FREEMAN, GB
    JOURNAL OF THE AMERICAN CERAMIC SOCIETY, 1991, 74 (10) : 2649 - 2658
  • [5] HOT FILAMENT ACTIVATED CHEMICAL VAPOR-DEPOSITION OF BORON-NITRIDE
    RYE, RR
    JOURNAL OF VACUUM SCIENCE & TECHNOLOGY A-VACUUM SURFACES AND FILMS, 1991, 9 (03): : 1099 - 1103
  • [6] KINETIC-ANALYSIS OF CHEMICAL VAPOR-DEPOSITION OF BORON-NITRIDE
    LEE, WY
    LACKEY, WJ
    AGRAWAL, PK
    JOURNAL OF THE AMERICAN CERAMIC SOCIETY, 1991, 74 (10) : 2642 - 2648
  • [7] PREPARATION AND PROPERTIES OF BORON-NITRIDE FILMS BY METAL ORGANIC-CHEMICAL VAPOR-DEPOSITION
    NAKAMURA, K
    JOURNAL OF THE ELECTROCHEMICAL SOCIETY, 1986, 133 (06) : 1120 - 1123
  • [8] Chemical vapor deposition of pyrolytic boron nitride from borazine
    Demin, VN
    Basov, AI
    Akkerman, ZL
    INORGANIC MATERIALS, 1998, 34 (08) : 823 - 826
  • [9] Chemical vapor deposition of pyrolytic boron nitride from borazine
    Demin, VN
    Asanov, IP
    Akkerman, ZL
    JOURNAL OF VACUUM SCIENCE & TECHNOLOGY A-VACUUM SURFACES AND FILMS, 2000, 18 (01): : 94 - 98
  • [10] Boron nitride coatings by chemical vapor deposition from borazine
    Li, Jun-Sheng
    Zhang, Chang-Rui
    Li, Bin
    Cao, Feng
    Wang, Si-Qing
    SURFACE & COATINGS TECHNOLOGY, 2011, 205 (12): : 3736 - 3741
12345