High Breakdown Voltage AlGaN/GaN HEMTs on Free-Standing GaN Substrate

被引:0
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作者
Ng, J. H. [1 ]
Tone, K. [1 ]
Asubar, J. T. [1 ]
Tokuda, H. [1 ]
Kuzuhara, M. [1 ]
机构
[1] Univ Fukui, Grad Sch Engn, 3-9-1 Bunkyo, Fukui 9108507, Japan
关键词
AlGaN/GaN; HEMT; Breakdown Voltage; Free-Standing GaN Substrate; BUFFER;
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中图分类号
TM [电工技术]; TN [电子技术、通信技术];
学科分类号
0808 ; 0809 ;
摘要
In this paper we have investigated the relationship between off-state breakdown voltage and gate-to-drain distance (Lgd) for AlGaN/GaN HEMTs fabricated on a freestanding GaN substrate. The off-state breakdown voltage exhibited a linear increase up to Lgd of around 80 mu m but saturated at about 4000 V when Lgd > 80 mu m. Therefore, we proposed that when Lgd < 80 mu m, the breakdown voltage of HEMTs was dominated by leakage current under the channel and when Lgd > 80 mu m, it was determined by the leakage current outside of the channel.
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页数:2
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