Rib Microring Resonators in Lithium Niobate on Insulator

被引:0
|
作者
Yohanes, Siew Shawn [1 ]
Saha, Soham Sataparno [1 ]
Tsang, Mankei [1 ]
Danner, Aaron James [1 ]
机构
[1] Natl Univ Singapore, Dept Elect & Comp Engn, Singapore, Singapore
关键词
Lithium Niobate; waveguides; microring resonators;
D O I
暂无
中图分类号
TM [电工技术]; TN [电子技术、通信技术];
学科分类号
0808 ; 0809 ;
摘要
Ridge microring resonators were fabricated via electron beam lithography and ion milling in lithium niobate on insulator (LNOI). LNOI is a single crystalline thin film of lithium niobate bonded to 2 mu m of SiO2 and a LiNbO3 substrate. Measurement results show a Q-factor of 4,000 as well as a propagation loss in the waveguide of 5.3dB/cm.
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页数:2
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