Rib Microring Resonators in Lithium Niobate on Insulator

被引：27
|
作者：
Siew, Shawn Y. [1 ]
Saha, Soham S. [1 ]
Tsang, Mankei [1 ]
Danner, Aaron J. [1 ]
机构：
[1] Natl Univ Singapore, Dept Elect & Comp Engn, Singapore 119077, Singapore
来源：
IEEE PHOTONICS TECHNOLOGY LETTERS | 2016年 / 28卷 / 05期
基金：
新加坡国家研究基金会;
关键词：
Electrooptic devices; electrooptic modulation; lithium compounds; optical resonators; optical waveguides; WAVE-GUIDES; SILICON; DEVICES;
D O I：
10.1109/LPT.2015.2508103
中图分类号：
TM [电工技术]; TN [电子技术、通信技术];
学科分类号：
0808 ; 0809 ;
摘要：
Rib microring resonators were fabricated via electron beam lithography and ion milling in lithium niobate on insulator (LNOI). LNOI is a single crystalline thin film of lithium niobate (LiNbO3) bonded to 1.8 mu m of SiO2 and an LiNbO3 substrate. Measurement results show a Q-factor of 2800 as well as a modulation depth of 18.7 dB.
引用
收藏
页码：573 / 576
页数：4
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