Rib Microring Resonators in Lithium Niobate on Insulator

被引：0
|
作者：
Yohanes, Siew Shawn [1 ]
Saha, Soham Sataparno [1 ]
Tsang, Mankei [1 ]
Danner, Aaron James [1 ]
机构：
[1] Natl Univ Singapore, Dept Elect & Comp Engn, Singapore, Singapore
来源：
2015 INTERNATIONAL CONFERENCE ON OPTICAL MEMS AND NANOPHOTONICS (OMN) | 2015年
关键词：
Lithium Niobate; waveguides; microring resonators;
D O I：
暂无
中图分类号：
TM [电工技术]; TN [电子技术、通信技术];
学科分类号：
0808 ; 0809 ;
摘要：
Ridge microring resonators were fabricated via electron beam lithography and ion milling in lithium niobate on insulator (LNOI). LNOI is a single crystalline thin film of lithium niobate bonded to 2 mu m of SiO2 and a LiNbO3 substrate. Measurement results show a Q-factor of 4,000 as well as a propagation loss in the waveguide of 5.3dB/cm.
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页数：2
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