Neural Network for Nanoscience Scanning Electron Microscope Image Recognition

被引:96
|
作者
Modarres, Mohammad Hadi [1 ]
Aversa, Rossella [2 ]
Cozzini, Stefano [2 ,3 ]
Ciancio, Regina [4 ]
Leto, Angelo [5 ]
Brandino, Giuseppe Piero [3 ]
机构
[1] Univ Cambridge, Dept Engn, Inst Mfg, 17 Charles Babbage Rd, Cambridge CB3 0FS, England
[2] CNR, IOM, SISSA, Via Bonomea 265, I-34136 Trieste, Italy
[3] eXact Lab Srl, Via Beirut 2, I-34151 Trieste, Italy
[4] CNR, IOM, TASC Lab, Area Sci Pk,Basovizza SS 14 Km 163-5, I-34149 Trieste, Italy
[5] Elegans Io Ltd, Bellside House,4th Floor,4 Elthorne Rd, London N19 4AG, England
来源
SCIENTIFIC REPORTS | 2017年 / 7卷
关键词
TISSUE-ENGINEERING SCAFFOLDS; FIBER ALIGNMENT;
D O I
10.1038/s41598-017-13565-z
中图分类号
O [数理科学和化学]; P [天文学、地球科学]; Q [生物科学]; N [自然科学总论];
学科分类号
07 ; 0710 ; 09 ;
摘要
In this paper we applied transfer learning techniques for image recognition, automatic categorization, and labeling of nanoscience images obtained by scanning electron microscope (SEM). Roughly 20,000 SEM images were manually classified into 10 categories to form a labeled training set, which can be used as a reference set for future applications of deep learning enhanced algorithms in the nanoscience domain. The categories chosen spanned the range of 0-Dimensional (0D) objects such as particles, 1D nanowires and fibres, 2D films and coated surfaces, and 3D patterned surfaces such as pillars. The training set was used to retrain on the SEM dataset and to compare many convolutional neural network models (Inception-v3, Inception-v4, ResNet). We obtained compatible results by performing a feature extraction of the different models on the same dataset. We performed additional analysis of the classifier on a second test set to further investigate the results both on particular cases and from a statistical point of view. Our algorithm was able to successfully classify around 90% of a test dataset consisting of SEM images, while reduced accuracy was found in the case of images at the boundary between two categories or containing elements of multiple categories. In these cases, the image classification did not identify a predominant category with a high score. We used the statistical outcomes from testing to deploy a semi-automatic workflow able to classify and label images generated by the SEM. Finally, a separate training was performed to determine the volume fraction of coherently aligned nanowires in SEM images. The results were compared with what was obtained using the Local Gradient Orientation method. This example demonstrates the versatility and the potential of transfer learning to address specific tasks of interest in nanoscience applications.
引用
收藏
页数:12
相关论文
共 50 条
  • [21] Ex-situ plasma diagnosis by combining scanning electron microscope, wavelet, and neural network
    Kim, Byungwhan
    Uh, Hyung Soo
    Kim, Donghwan
    MATERIALS SCIENCE IN SEMICONDUCTOR PROCESSING, 2008, 11 (03) : 87 - 93
  • [22] A deep residual neural network for semiconductor defect classification in imbalanced scanning electron microscope datasets
    Lopez de la Rosa, Francisco
    Gomez-Sirvent, Jose L.
    Morales, Rafael
    Sanchez-Reolid, Roberto
    Fernandez-Caballero, Antonio
    APPLIED SOFT COMPUTING, 2022, 131
  • [23] Comparative study of image contrast in scanning electron microscope and helium ion microscope
    O'Connell, R.
    Chen, Y.
    Zhang, H.
    Zhou, Y.
    Fox, D.
    Maguire, P.
    Wang, J. J.
    Rodenburg, C.
    JOURNAL OF MICROSCOPY, 2017, 268 (03) : 313 - 320
  • [24] Image improvement with modified scanning waves and noise reduction in a scanning electron microscope
    Kim, Dong Hwan
    Kim, Seung Jae
    Oh, Se Kyu
    NUCLEAR INSTRUMENTS & METHODS IN PHYSICS RESEARCH SECTION A-ACCELERATORS SPECTROMETERS DETECTORS AND ASSOCIATED EQUIPMENT, 2010, 620 (2-3): : 112 - 120
  • [25] Convolutional Neural Network Models for Scattering Pattern Recognition of Scanning Electron Microscopy Images
    Phankokkruad, Manop
    Wacharawichanant, Sirirat
    2018 5TH INTERNATIONAL CONFERENCE ON COMPUTATIONAL SCIENCE/ INTELLIGENCE AND APPLIED INFORMATICS (CSII 2018), 2018, : 27 - 31
  • [26] 3-D Image Reconstruction in the Scanning Electron Microscope
    Vanderlinde, William E.
    ISTFA 2008: CONFERENCE PROCEEDINGS FROM THE 34TH INTERNATIONAL SYMPOSIUM FOR TESTING AND FAILURE ANALYSIS, 2008, : 515 - 523
  • [27] SIMULATION OF SCANNING ELECTRON-MICROSCOPE IMAGE FOR TRENCH STRUCTURES
    KOTERA, M
    YAMAGUCHI, S
    UMEGAKI, S
    SUGA, H
    JAPANESE JOURNAL OF APPLIED PHYSICS PART 1-REGULAR PAPERS SHORT NOTES & REVIEW PAPERS, 1993, 32 (12B): : 6281 - 6286
  • [28] Image sharpness measurement in the scanning electron microscope -: Part III
    Zhang, NF
    Postek, MT
    Larrabee, RD
    Vladár, AE
    Keery, WJ
    Jones, SN
    SCANNING, 1999, 21 (04) : 246 - 252
  • [29] SIMPLE IMAGE ANALYZING ATTACHMENT FOR A SCANNING ELECTRON-MICROSCOPE
    PARKER, BA
    ROSSITER, PL
    JOURNAL OF THE AUSTRALASIAN INSTITUTE OF METALS, 1976, 21 (04): : 191 - 194
  • [30] Improvement to the scanning electron microscope image colourization by adaptive tuning
    Sim, K. S.
    Ting, H. Y.
    Lai, M. A.
    Tso, C. P.
    JOURNAL OF MICROSCOPY-OXFORD, 2009, 234 (03): : 243 - 250