3-D Image Reconstruction in the Scanning Electron Microscope

被引：1

作者：

Vanderlinde, William E. ^{[1
]}

机构：

[1] Lab Phys Sci, College Pk, MD 20740 USA

来源：

ISTFA 2008: CONFERENCE PROCEEDINGS FROM THE 34TH INTERNATIONAL SYMPOSIUM FOR TESTING AND FAILURE ANALYSIS | 2008年

关键词：

D O I：

10.1361/cp2008istfa515

中图分类号：

TB3 [工程材料学];

学科分类号：

0805 ; 080502 ;

摘要：

This paper demonstrates that an SEM stereo-pair can be accurately translated into a Digital Elevation Model (DEM) using commercial software running on a desktop computer. The DEM is easy to view without any special equipment and can provide accurate measurements of the sample in all three dimensions. Vertical height measurements with high accuracy can be obtained from the elevation model when the sample has sufficient surface texture and a uniform baseline.

引用

页码：515 / 523

页数：9

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