Polarization and leakage degradation of Pt/SrBi2Ta2O9/Pt capacitors and their recovery

Water (H2O) vapor-induced degradation of SrBi2Ta2O9 (SBT) capacitors has been investigated. SBT capacitors with no passivation layer were maintained in the atmosphere at 20 degrees C for one-half year after their preparation. The capacitors showed pronounced degradation of polarization and increased leakage currents. A recovery process based on H2O vaporization from the SBT films was examined. We succeeded in completely recovering the polarization, fatigue and leakage current characteristics using thermal annealing at 300 degrees C in a vacuum.