Polarization and leakage degradation of Pt/SrBi2Ta2O9/Pt capacitors and their recovery

被引：2
|
作者：
Tamai, S [1 ]
Maeda, Y [1 ]
Kobayashi, H [1 ]
机构：
[1] Kyoto Univ, Dept Energy Sci & Technol, Sakyo Ku, Kyoto 6068501, Japan
来源：
JAPANESE JOURNAL OF APPLIED PHYSICS PART 1-REGULAR PAPERS BRIEF COMMUNICATIONS & REVIEW PAPERS | 2005年 / 44卷 / 9B期
关键词：
SrBi2Ta2O9; water vapor-induced degradation; polarization switching; recovery; leakage current; electrolysis; Pt electrode;
D O I：
10.1143/JJAP.44.6943
中图分类号：
O59 [应用物理学];
学科分类号：
摘要：
Water (H2O) vapor-induced degradation of SrBi2Ta2O9 (SBT) capacitors has been investigated. SBT capacitors with no passivation layer were maintained in the atmosphere at 20 degrees C for one-half year after their preparation. The capacitors showed pronounced degradation of polarization and increased leakage currents. A recovery process based on H2O vaporization from the SBT films was examined. We succeeded in completely recovering the polarization, fatigue and leakage current characteristics using thermal annealing at 300 degrees C in a vacuum.
引用
收藏
页码：6943 / 6946
页数：4
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