A fishbone-shape on-chip antenna structure based on silicon nitride photonics

被引:0
|
作者
Yang, Bo [1 ,2 ]
Chen, Hongwei [1 ,2 ]
Yang, Sigang [1 ,2 ]
Liu, Zunlong [3 ]
Geng, Qiang [3 ]
Chen, Minghua [1 ,2 ]
机构
[1] Tsinghua Univ, Dept Elect Engn, Beijing 100084, Peoples R China
[2] Beijing Natl Res Ctr Informat Sci & Technol, Beijing 100013, Peoples R China
[3] Beijing Huahang Radio Measurement Inst, Beijing 100013, Peoples R China
基金
美国国家科学基金会;
关键词
Photonic Integration; SIDEWALL GRATINGS;
D O I
暂无
中图分类号
TM [电工技术]; TN [电子技术、通信技术];
学科分类号
0808 ; 0809 ;
摘要
A fishbone-shape on-chip antenna structure based on 200nm thick silicon nitride platform is proposed, which can be fabricated by simple fabrication process. Two high-efficiency antennas based on this structure are shown in this paper.
引用
收藏
页数:3
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