New uses of IC technology will enable better opportunities for optical lithography

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作者：
Resor, Griff
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SOLID STATE TECHNOLOGY | 2007年 / 50卷 / 11期
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TM [电工技术]; TN [电子技术、通信技术];
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0808 ; 0809 ;
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页码：55 / 55
页数：1
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