Pulsed laser deposition of SrTiO3/LaGaO3 and SrTiO3/LaAlO3: Plasma plume effects

被引：66
|
作者：
Aruta, C. [1 ]
Amoruso, S.
Bruzzese, R.
Wang, X.
Maccariello, D.
Granozio, F. Miletto
di Uccio, U. Scotti
机构：
[1] Complesso Univ Monte St Angelo, Dipartimento Sci Fis, I-80126 Naples, Italy
来源：
APPLIED PHYSICS LETTERS | 2010年 / 97卷 / 25期
关键词：
All Open Access; Green;
D O I：
10.1063/1.3529487
中图分类号：
O59 [应用物理学];
学科分类号：
摘要：
The pulsed laser deposition of SrTiO3/LaGaO3 and SrTiO3/LaAlO3 interfaces is analyzed with a focus on the kinetic energy of the ablated species. LaGaO3 and LaAlO3 plasma plumes were studied by fast photography and space-resolved optical emission spectroscopy. Reflection high energy electron diffraction was performed proving a layer-by-layer growth up to 10(-1) mbar oxygen pressure. The role of the energetic plasma plume on the two-dimensional growth and on the presence of interfacial defects at different oxygen growth pressures is discussed in connection with the conducting properties of the polar/nonpolar interfaces. (C) 2010 American Institute of Physics. [doi:10.1063/1.3529487]
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