High resolution retarding field analyser

被引：0
|
作者：
Johnson, SD [1 ]
El-Gomati, MM [1 ]
Mahadevan, J [1 ]
Enloe, L [1 ]
机构：
[1] Univ Cambridge, Cavendish Lab, Cambridge CB3 0HE, England
来源：
IVMC 2000: PROCEEDINGS OF THE 14TH INTERNATIONAL VACUUM MICROELECTRONICES CONFERENCE | 2001年
关键词：
D O I：
暂无
中图分类号：
TM [电工技术]; TN [电子技术、通信技术];
学科分类号：
0808 ; 0809 ;
摘要：
A novel electrostatic charged particle energy analyser based on the high resolution retarding field analyser is presented. This device has been designed to allow for complete miniaturisation using existing silicon micromachining techniques. Experimental data collated using large scale versions of this device indicate that the resolution is dependent on the length to diameter ratio of the analyser body with an optimum resolution of 1% being obtained.
引用
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页码：11 / 12
页数：2
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