High resolution retarding field analyser

被引：0
|
作者：
Johnson, SD [1 ]
El-Gomati, MM [1 ]
Mahadevan, J [1 ]
Enloe, L [1 ]
机构：
[1] Univ Cambridge, Cavendish Lab, Cambridge CB3 0HE, England
来源：
IVMC 2000: PROCEEDINGS OF THE 14TH INTERNATIONAL VACUUM MICROELECTRONICES CONFERENCE | 2001年
关键词：
D O I：
暂无
中图分类号：
TM [电工技术]; TN [电子技术、通信技术];
学科分类号：
0808 ; 0809 ;
摘要：
A novel electrostatic charged particle energy analyser based on the high resolution retarding field analyser is presented. This device has been designed to allow for complete miniaturisation using existing silicon micromachining techniques. Experimental data collated using large scale versions of this device indicate that the resolution is dependent on the length to diameter ratio of the analyser body with an optimum resolution of 1% being obtained.
引用
收藏
页码：11 / 12
页数：2
相关论文
共 50 条
  • [11] PEEM WITH TWO COMPLEMENTARY ELECTRON ENERGY FILTERS: TOF AND RETARDING FIELD ANALYSER
    Weber, N. B.
    Escher, M.
    Merkel, M.
    Lin, J.
    Kleineberg, U.
    RECENT TRENDS IN CHARGED PARTICLE OPTICS AND SURFACE PHYSICS INSTRUMENTATION, PROCEEDINGS, 2008, : 107 - +
  • [12] LOCAL FIELD EFFECTS ON VOLTAGE MEASUREMENT USING A RETARDING FIELD ANALYSER IN THE SCANNING ELECTRON MICROSCOPY.
    Fujioka, H.
    Nakamae, K.
    Ura, K.
    Scanning Electron Microscopy, 1981, : 323 - 332
  • [13] A kinetic model of retarding field analyser measurements in strongly magnetized, flowing, collisional plasmas
    Gunn, J. P.
    Fuchs, V.
    Kocan, M.
    PLASMA PHYSICS AND CONTROLLED FUSION, 2013, 55 (04)
  • [14] Ion energy analysis of a bipolar HiPIMS discharge using a retarding field energy analyser
    Walk, F.
    Valizadeh, R.
    Bradley, J. W.
    PLASMA SOURCES SCIENCE & TECHNOLOGY, 2022, 31 (06):
  • [15] Spherical micro-hole grid for high-resolution retarding field analyzer
    Muro, Takayuki
    Matsushita, Tomohiro
    Sawamura, Kazumi
    Mizuno, Jun
    JOURNAL OF SYNCHROTRON RADIATION, 2021, 28 : 1669 - 1671
  • [16] RESOLUTION OF RETARDING FIELD ENERGY ANALYZERS .1.
    JAGHER, PCD
    HOPMAN, HJ
    VRIJDAGH.JB
    JOURNAL OF PHYSICS E-SCIENTIFIC INSTRUMENTS, 1974, 7 (06): : 486 - 489
  • [17] HIGH-RESOLUTION RETARDING POTENTIAL ANALYZER
    ENLOE, CL
    REVIEW OF SCIENTIFIC INSTRUMENTS, 1994, 65 (02): : 507 - 508
  • [18] A new expression for the resolution of a uniform magnetic field analyser
    Meunier, R
    CottereauLarson, E
    NUCLEAR INSTRUMENTS & METHODS IN PHYSICS RESEARCH SECTION A-ACCELERATORS SPECTROMETERS DETECTORS AND ASSOCIATED EQUIPMENT, 1997, 395 (02): : 207 - 209
  • [19] Ion temperature measurements of L-mode filaments in MAST by retarding field energy analyser
    Allan, S. Y.
    Elmore, S.
    Fishpool, G.
    Dudson, B.
    PLASMA PHYSICS AND CONTROLLED FUSION, 2016, 58 (04)
  • [20] SMALL SIZE RETARDING FIELD ENERGY ANALYSER FOR LOCAL MEASUREMENT OF ELECTRONIC DISTRIBUTION FUNCTION IN A MAGNETOPLASMA
    BOUCHOULE, A
    WEINFELD, M
    JOURNAL OF PHYSICS E-SCIENTIFIC INSTRUMENTS, 1970, 3 (08): : 651 - +
12345