Dynamic behaviour of nanoscale electrostatic actuators

被引:0
|
作者
Lin, WH [1 ]
Zhao, YP [1 ]
机构
[1] Chinese Acad Sci, Inst Mech, State Key Lab Nonlinear Mech, Beijing 100080, Peoples R China
关键词
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中图分类号
O4 [物理学];
学科分类号
0702 ;
摘要
The dynamic behaviour for nanoscale electrostatic actuators is studied. A two parameter mass-spring model is shown to exhibit a bifurcation from the case excluding an equilibrium point to the case including two equilibrium points as the geometrical dimensions of the device are altered. Stability analysis shows that one is a stable Hopf bifurcation point and the other is an unstable saddle point. In addition, we plot the diagram phases, which have periodic orbits around the Hopf point and a homoclinic orbit passing though the unstable saddle point.
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页码:2070 / 2073
页数:4
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