共 50 条
- [31] Shape optimizations and static/dynamic characterizations of deformable microplate structures with multiple electrostatic actuators [J]. MICROSYSTEM TECHNOLOGIES-MICRO-AND NANOSYSTEMS-INFORMATION STORAGE AND PROCESSING SYSTEMS, 2008, 14 (02): : 255 - 266
- [34] Compact modeling of bistable electrostatic actuators [J]. 1999 INTERNATIONAL CONFERENCE ON MODELING AND SIMULATION OF MICROSYSTEMS, 1999, : 289 - 292
- [35] ULTRASONIC ELECTROSTATIC ACTUATORS ON A FLEXIBLE SUBSTRATE [J]. 2012 IEEE 25TH INTERNATIONAL CONFERENCE ON MICRO ELECTRO MECHANICAL SYSTEMS (MEMS), 2012,
- [38] Predicting the switching time of electrostatic actuators [J]. MEMS 2008: 21ST IEEE INTERNATIONAL CONFERENCE ON MICRO ELECTRO MECHANICAL SYSTEMS, TECHNICAL DIGEST, 2008, : 491 - 494
- [40] ACCURACY OF ELECTROSTATIC ACTUATORS IN MICROPHONE CALIBRATIONS [J]. JOURNAL OF THE ACOUSTICAL SOCIETY OF AMERICA, 1969, 45 (01): : 347 - &