High resolution x-ray scattering investigation of Pt/LaF3/Si(111) structures

Recently developed high resolution X-ray methods have been used to characterize the structure of Pt/LaF3/Si samples. The asymptotic Bragg diffraction is used for the study of the LaF3/Si interface and the grazing-incidence X-ray diffraction (GIXD) for the study of the LaF3, texture. The LaF3/Si interface was found to be thin and smooth with the interface thickness value 0.55 +/- 0.1 nm. The essential extra-broadening of the main peak in diffraction experiments for samples with the top platinum layer is explained by the small angle scattering of the X-ray beam on the rough Pt film. The LaF3-film domain structure is derived from GIXD data. (C) 1998 Elsevier Science B.V. All rights reserved.