Atomic force microscope anodization lithography using organic molecular assembly and ferritin

被引：3
|
作者：
Lee, Wonbae [1 ]
Kim, Hyunsook
Lee, Haiwon
Hara, Masahiko
机构：
[1] RIKEN, Frontier Res Syst, Wako, Saitama 3510198, Japan
[2] Hanyang Univ, Dept Chem, Seoul 133791, South Korea
来源：
COLLOIDS AND SURFACES A-PHYSICOCHEMICAL AND ENGINEERING ASPECTS | 2008年 / 313卷
关键词：
nanofabrication; ferritin; AFM lithography; self-assembled monolayer; anodization;
D O I：
10.1016/j.colsurfa.2007.05.044
中图分类号：
O64 [物理化学（理论化学）、化学物理学];
学科分类号：
070304 ; 081704 ;
摘要：
Nanopattern fabrications using self-assembled organic layer and exotic bio-material ferritin on silicon substrates by atomic force microscope (AFM) anodization are presented. The self-assembled n-tridecylamine. hydrochloride monolayer (TDAHCI SAM) and ferritin-covered layer are fabricated under fine controls as the organic resists for AFM anodization, and the characterizations are accomplished by AFM and lateral force microscopy (LFM). The resultant patterns are investigated by considering the features of characterized molecular layers for discussing and elucidating the effects of the employed film and ferritin on the AFM anodization. (C) 2007 Elsevier B.V. All rights reserved.
引用
收藏
页码：402 / 406
页数：5
相关论文
共 50 条
  • [21] Nano-lithography by electron exposure using an Atomic Force Microscope
    Davidsson, P
    Lindell, A
    Mäkelä, T
    Paalanen, M
    Pekola, J
    [J]. MICROELECTRONIC ENGINEERING, 1999, 45 (01) : 1 - 8
  • [22] Nanoscale graphene and carbon nanotube lithography using an atomic force microscope
    Kumar, Kitu
    Sul, Onejae
    Tsai, Yao-Tsan
    Choi, Daniel
    Prasad, M. G.
    Fisher, Frank
    Strauf, Stefan
    Yang, E. H.
    [J]. IMECE 2009: PROCEEDINGS OF THE ASME INTERNATIONAL MECHANICAL ENGINEERING CONGRESS AND EXPOSITION, VOL 12, PTS A AND B, 2010, : 417 - 418
  • [23] Nanoscale anodization of an amorphous silicon surface with an atomic force microscope
    Umezu, I
    Yoshida, T
    Matsumoto, K
    Sugimura, A
    Inada, M
    [J]. APPLIED PHYSICS LETTERS, 2002, 81 (08) : 1492 - 1493
  • [24] Velocity controlled anodization nanolithography with an atomic force microscope using Faradaic current feedback
    Johannes, Matthew S.
    Cole, Daniel G.
    Clark, Robert L.
    [J]. APPLIED PHYSICS LETTERS, 2007, 90 (10)
  • [25] Molecular recognition studies using the atomic force microscope
    Hinterdorfer, P
    [J]. ATOMIC FORCE MICROSCOPY IN CELL BIOLOGY, 2002, 68 : 115 - 139
  • [26] Fabrication and characterization of nanowires by atomic force microscope lithography
    Fok, L. M.
    Liu, Y. H.
    Li, Wen J.
    [J]. 2006 IEEE/RSJ INTERNATIONAL CONFERENCE ON INTELLIGENT ROBOTS AND SYSTEMS, VOLS 1-12, 2006, : 1927 - +
  • [27] Characterization of structures fabricated by atomic force microscope Lithography
    Fu, ES
    Wang, XS
    Williams, ED
    [J]. SURFACE SCIENCE, 1999, 438 (1-3) : 58 - 67
  • [28] Centimeter scale atomic force microscope imaging and lithography
    Minne, SC
    Adams, JD
    Yaralioglu, G
    Manalis, SR
    Atalar, A
    Quate, CF
    [J]. APPLIED PHYSICS LETTERS, 1998, 73 (12) : 1742 - 1744
  • [29] The atomic force microscope as a nanoscale stereo lithography machine
    Johannes, Matthew S.
    Cole, Daniel G.
    Clark, Robert L.
    [J]. 19TH INTERNATIONAL CONFERENCE ON DESIGN THEORY AND METHODOLOGY/1ST INTERNATIONAL CONFERENCE ON MICRO AND NANO SYSTEMS, VOL 3, PART A AND B, 2008, : 793 - 799
  • [30] New approaches to atomic force microscope lithography on silicon
    Birkelund, K
    Thomsen, EV
    Rasmussen, JP
    Hansen, O
    Tang, PT
    Moller, P
    Grey, F
    [J]. JOURNAL OF VACUUM SCIENCE & TECHNOLOGY B, 1997, 15 (06): : 2912 - 2915
12345