Fabrication of Cobalt Magnetic Nanostructures Using Atomic Force Microscope Lithography

被引:9
|
作者
Chu, Haena [1 ]
Yun, Seonghun [1 ]
Lee, Haiwon [1 ]
机构
[1] Hanyang Univ, Dept Chem, Seoul 133791, South Korea
基金
新加坡国家研究基金会;
关键词
Cobalt; AFM Lithography; Metal Nanostructure; SCANNING PROBE LITHOGRAPHY; ARRAYS; NANOWIRES; PATTERNS; FE;
D O I
10.1166/jnn.2013.8173
中图分类号
O6 [化学];
学科分类号
0703 ;
摘要
Cobalt nanopatterns are promising assemblies for patterned magnetic storage applications. The fabrication of cobalt magnetic nanostructures on n-tridecylamine center dot hydrochloride (TDA center dot HCl) self-assembled monolayer (SAM) modified silicon surfaces using direct writing atomic force microscope (AFM) lithography for localized electrochemical reduction of cobalt ions was demonstrated. The ions were reduced to form metal nanowires along the direction of the electricfield between the AFM tip and the substrate. In this lithography process, TDA center dot HCl SAMs play an important role in the lithography process for improving the resolution of cobalt nanopatterns by preventing nonspecific reduction of cobalt ions on the unwritten background. Cobalt nanowires and nanodots with width of 225 +/- 26 nm and diameter of 208 +/- 28 nm were successfully fabricated. Platinium-coated polydimethylsiloxane (PDMS) stamp was used fabricating bulk cobalt structures which can be detected by energy dispersive X-ray spectroscopy for element analysis and the physical and magnetic properties of these cobalt nanopatterns were characterized using AFM and magnetic force microscope.
引用
收藏
页码:8055 / 8058
页数:4
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