Design and fabrication of prototype piezoelectric adjustable X-ray mirrors

被引：16
|
作者：
Walker, Julian [1 ,2 ]
Liu, Tianning [1 ,2 ,3 ]
Tendulkar, Mohit [3 ]
Burrows, David N. [4 ]
DeRoo, Casey T. [5 ]
Allured, Ryan [5 ]
Hertz, Edward N. [5 ]
Cotroneo, Vincenzo [5 ]
Reid, Paul B. [5 ]
Schwartz, Eric D. [5 ]
Jackson, Thomas N. [1 ,2 ,3 ]
Trolier-McKinstry, Susan [1 ,2 ]
机构：
[1] Penn State Univ, Mat Sci & Engn Dept, Millennium Sci Complex, University Pk, PA 16802 USA
[2] Penn State Univ, Mat Res Inst, Millennium Sci Complex, University Pk, PA 16802 USA
[3] Penn State Univ, Dept Elect Engn, Ctr Thin Film Devices, University Pk, PA 16802 USA
[4] Penn State Univ, Dept Astron & Astrophys, 525 Davey Lab, University Pk, PA 16802 USA
[5] Harvard Smithsonian Ctr Astrophys, 60 Garden St, Cambridge, MA 02138 USA
来源：
OPTICS EXPRESS | 2018年 / 26卷 / 21期
基金：
美国国家航空航天局;
关键词：
ANISOTROPIC-CONDUCTIVE FILM; PZT THIN-FILMS; STRESS; DEPOSITION; TELESCOPE; COATINGS;
D O I：
10.1364/OE.26.027757
中图分类号：
O43 [光学];
学科分类号：
070207 ; 0803 ;
摘要：
Lynx, a next generation X-ray observatory concept currently under study, requires lightweight, high spatial resolution X-ray mirrors. Here we detail the development and fabrication of one of the candidate technologies for Lynx, piezoelectric adjustable X-ray optics. These X-ray mirrors are thin glass shell mirrors with Cr/Ir X-ray reflective coatings on the mirror side and piezoelectric thin film actuators on the actuator side. Magnetron sputtering was used to deposit metal electrodes and metal-oxide piezoelectric layers. The piezoelectric (Pb-0.995(Zr0.52Ti0.48)(0.99)Nb0.01O3) was divided into 112 independent piezoelectric actuators, with 100% yield achieved. We discuss the fabrication procedure, residual thermal stresses and tuning of the Cr/Ir coating stress for the purposes of stress balancing. (c) 2018 Optical Society of America under the terms of the OSA Open Access Publishing Agreement
引用
收藏
页码：27757 / 27772
页数：16
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