Design, fabrication, and study of wideband multilayer X-ray mirrors

被引：5
|
作者：
Kozhevnikov, I. V.
Voronov, A. S.
Roshchin, B. S.
Asadchikov, V. E.
Mednikov, K. N.
Pirozhkov, A. S.
Ragozin, E. N.
Wang, Zh.
Zhong, Zh.
Wang, F.
机构：
[1] Russian Acad Sci, AV Shubnikov Crystallog Inst, Moscow 119333, Russia
[2] Russian Acad Sci, PN Lebedev Phys Inst, Moscow 119991, Russia
来源：
CRYSTALLOGRAPHY REPORTS | 2006年 / 51卷 / 06期
基金：
俄罗斯基础研究基金会;
关键词：
D O I：
10.1134/S1063774506060186
中图分类号：
O7 [晶体学];
学科分类号：
0702 ; 070205 ; 0703 ; 080501 ;
摘要：
Multilayer depth-graded (aperiodic) W/Si and W/B4C mirrors with a period changing over depth have been designed, fabricated, and investigated. The mirrors have almost constant reflectance (from 25 to 35% for different mirrors) at a wavelength of 0.154 nm in a wide range of grazing angles (the reflection bandwidth ranges from 0.25 degrees to 0.4 degrees). It is shown that the main reason for the distortions observed on the plateau of the reflection curve is incorrect consideration of the interlayers formed at the interface of neighboring films during fabrication of the structures. The mirrors with sharp interfaces (for example, WSi2/Si) are preferential for practical purposes.
引用
收藏
页码：1075 / 1081
页数：7
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