On the nano-hillock formation induced by slow highly charged ions on insulator surfaces

被引：44

作者：

Lemell, C. ^{[1
]}

El-Said, A. S.

Meissl, W.

Gebeshuber, I. C.

Trautmann, C.

Toulemonde, M.

Burgdoerfer, J.

Aumayr, F.

机构：

[1] Vienna Univ Technol, Inst Theoret Phys, A-1040 Vienna, Austria

[2] Mansoura Univ, Fac Sci, Dept Phys, Mansoura 35516, Egypt

[3] Vienna Univ Technol, Inst Allgemeine Phys, A-1040 Vienna, Austria

[4] GSI Darmstadt, D-64291 Darmstadt, Germany

[5] CNRS, Ctr Interdisciplinaire Rech Ions Laser, Lab Commun CEA, UCBN ENSICAEN, F-14070 Caen, France

来源：

SOLID-STATE ELECTRONICS | 2007年 / 51卷 / 10期

关键词：

hillock formation; ion-insulator interactions; nanostructuring;

D O I：

10.1016/j.sse.2007.06.016

中图分类号：

TM [电工技术]; TN [电子技术、通信技术];

学科分类号：

0808 ; 0809 ;

摘要：

We discuss the creation of nano-sized protrusions on insulating surfaces using slow highly charged ions. This method holds the promise of forming regular structures on surfaces without inducing defects in deeper lying crystal layers. We find that only projectiles with a potential energy above a critical value are able to create hillocks. Below this threshold no surface modification is observed. This is similar to the track and hillock formation induced by swift (similar to GeV) heavy ions. We present a model for the conversion of potential energy stored in the projectiles into target-lattice excitations (heat) and discuss the possibility to create ordered structures using the guiding effect observed in insulating conical structures. (C) 2007 Elsevier Ltd. All rights reserved.

引用

页码：1398 / 1404

页数：7

共 50 条

[21] Novel aspects on the irradiation of HOPG surfaces with slow highly charged ions
Ritter, R.
Shen, Q.
Wilhelm, R. A.
Heller, R.
Ginzel, R.
Lopez-Urrutia, J. R. Crespo
Facsko, S.
Teichert, C.
Aumayr, F.
NUCLEAR INSTRUMENTS & METHODS IN PHYSICS RESEARCH SECTION B-BEAM INTERACTIONS WITH MATERIALS AND ATOMS, 2013, 315 : 252 - 256
[22] Nanostructuring CaF2 surfaces with slow highly charged ions
El-Said, A. S.
Wilhelm, R. A.
Heller, R.
Ritter, R.
Wachter, G.
Facsko, S.
Lemell, C.
Burgdoerfer, J.
Aumayr, F.
XXVIII INTERNATIONAL CONFERENCE ON PHOTONIC, ELECTRONIC AND ATOMIC COLLISIONS (ICPEAC), 2014, 488
[23] Cluster ion emission in the interaction of slow highly charged ions with surfaces
T. Schenkel
A.V. Barnes
A.V. Hamza
D.H. Schneider
The European Physical Journal D - Atomic, Molecular, Optical and Plasma Physics, 1998, 1 : 297 - 302
[24] Formation of surface nano-structures by plasma expansion induced by highly charged ions
Moslem, W. M.
El-Said, A. S.
PHYSICS OF PLASMAS, 2012, 19 (12)
[25] Electron dynamics at surfaces induced by highly charged ions
Morgenstern, R
IZVESTIYA AKADEMII NAUK SERIYA FIZICHESKAYA, 1998, 62 (04): : 806 - 812
[26] Nano-sized surface modifications induced by the impact of slow highly charged ions - A first review
Aumayr, F.
El-Said, A. S.
Meissl, W.
NUCLEAR INSTRUMENTS & METHODS IN PHYSICS RESEARCH SECTION B-BEAM INTERACTIONS WITH MATERIALS AND ATOMS, 2008, 266 (12-13): : 2729 - 2735
[27] Guiding of slow highly charged ions through insulating nano-capillaries
Zhang, H. Q.
Skog, P.
Schuch, R.
14TH INTERNATIONAL CONFERENCE ON THE PHYSICS OF HIGHLY CHARGED IONS (HCI 2008), 2009, 163
[28] Nano-hillock formation in diamond-like carbon induced by swift heavy projectiles in the electronic stopping regime: Experiments and atomistic simulations
Schwen, D.
Bringa, E.
Krauser, J.
Weidinger, A.
Trautmann, C.
Hofsaess, H.
APPLIED PHYSICS LETTERS, 2012, 101 (11)
[29] Interaction of highly charged ions with insulator surfaces at low velocities:: Estimates for Auger rates
Burgdörfer, J
Reinhold, CO
Meyer, F
NUCLEAR INSTRUMENTS & METHODS IN PHYSICS RESEARCH SECTION B-BEAM INTERACTIONS WITH MATERIALS AND ATOMS, 2003, 205 : 690 - 699
[30] Cratering Induced by Slow Highly Charged Ions on Ultrathin PMMA Films
Thomaz, Raquel S.
Ernst, Philipp
Grande, Pedro L.
Schleberger, Marika
Papaleo, Ricardo M.
ATOMS, 2022, 10 (04)

← 1 2 3 4 5 →