A novel electro-thermal actuated micro position lock

被引：0

作者：

Guo, H ^{[1
]}

Zhang, HX ^{[1
]}

机构：

[1] Peking Univ, Inst Microelect, Beijing 100871, Peoples R China

来源：

2004: 7TH INTERNATIONAL CONFERENCE ON SOLID-STATE AND INTEGRATED CIRCUITS TECHNOLOGY, VOLS 1- 3, PROCEEDINGS | 2004年

关键词：

MEMS; micro-electro-mechanical systems; thermal actuator; bent-beam; cold and hot arm;

D O I：

暂无

中图分类号：

TM [电工技术]; TN [电子技术、通信技术];

学科分类号：

0808 ; 0809 ;

摘要：

This paper presents a novel electro-thermal actuated micro position lock. The device consumes power only during switching operation, and with no standby power consuming at all. This feature can extremely reduce power consumption and extend the device reliability. The device needs 5V to drive which is compatible with conventional CMOS logic. This kind of position lock could be used in controlling micro-tube, which is an essential component in Bio-MEMS chips and microfluidic chips.

引用

页码：1915 / 1918

页数：4

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