A novel electro-thermal actuated micro position lock

被引：0
|
作者：
Guo, H [1 ]
Zhang, HX [1 ]
机构：
[1] Peking Univ, Inst Microelect, Beijing 100871, Peoples R China
来源：
2004: 7TH INTERNATIONAL CONFERENCE ON SOLID-STATE AND INTEGRATED CIRCUITS TECHNOLOGY, VOLS 1- 3, PROCEEDINGS | 2004年
关键词：
MEMS; micro-electro-mechanical systems; thermal actuator; bent-beam; cold and hot arm;
D O I：
暂无
中图分类号：
TM [电工技术]; TN [电子技术、通信技术];
学科分类号：
0808 ; 0809 ;
摘要：
This paper presents a novel electro-thermal actuated micro position lock. The device consumes power only during switching operation, and with no standby power consuming at all. This feature can extremely reduce power consumption and extend the device reliability. The device needs 5V to drive which is compatible with conventional CMOS logic. This kind of position lock could be used in controlling micro-tube, which is an essential component in Bio-MEMS chips and microfluidic chips.
引用
收藏
页码：1915 / 1918
页数：4
相关论文
共 50 条
  • [21] Design and Electro-Thermal Analysis of a Platinum Micro Heater for Gas Sensors
    Bedoui, Souhir
    Gomri, Sami
    Samet, Hekmet
    Kachouri, Abdennaceur
    2016 13TH INTERNATIONAL MULTI-CONFERENCE ON SYSTEMS, SIGNALS & DEVICES (SSD), 2016, : 558 - 561
  • [22] ELECTRO-THERMAL EFFECTS IN OVONICS
    BOER, KW
    PHYSICA STATUS SOLIDI A-APPLIED RESEARCH, 1971, 4 (03): : 571 - &
  • [23] Integrated electro-thermal probe
    Reano, RM
    Yang, K
    Whitaker, JF
    Katehi, LPB
    2001 IEEE MTT-S INTERNATIONAL MICROWAVE SYMPOSIUM DIGEST, VOLS 1-3, 2001, : 1523 - 1526
  • [24] An electro-thermal HBV model
    Ingvarson, M
    Vukusic, J
    Olsen, AO
    Emadi, TA
    Stake, J
    2005 IEEE MTT-S INTERNATIONAL MICROWAVE SYMPOSIUM, VOLS 1-4, 2005, : 1151 - 1153
  • [25] Compliant electro-thermal microactuators
    Jonsmann, J
    Sigmund, O
    Bouwstra, S
    MEMS '99: TWELFTH IEEE INTERNATIONAL CONFERENCE ON MICRO ELECTRO MECHANICAL SYSTEMS, TECHNICAL DIGEST, 1999, : 588 - 593
  • [26] Electro-thermal investigation of OLEDs
    Pohl, L.
    Kollar, E.
    Kohari, Zs.
    Poppe, A.
    14TH INTERNATIONAL WORKSHOP ON THERMAL INVESTIGATION OF ICS AND SYSTEMS, 2008, : 235 - 240
  • [27] Electro-thermal excitation of parametric resonances in double-clamped micro beams
    Torteman, B.
    Kessler, Y.
    Liberzon, A.
    Krylov, S.
    APPLIED PHYSICS LETTERS, 2019, 115 (19)
  • [28] Design and fabrication of Electro-Thermal 1-D Micro-Mirror
    Maharshi, Vikram
    Mere, Viphretuo
    Agarwal, Ajay
    PROCEEDINGS OF 2018 IEEE INTERNATIONAL CONFERENCE ON ELECTRON DEVICES KOLKATA CONFERENCE (IEEE EDKCON), 2018, : 419 - 422
  • [29] Enhancement of Electro-Thermal Characteristics of Micro/Nano ZnO Based Surge Arrester
    R. Rohini
    C. Pugazhendhi Sugumaran
    Journal of Electrical Engineering & Technology, 2021, 16 : 469 - 481
  • [30] Characterization of an electro-thermal micro gripper and tip sharpening using FIB technique
    Deutschinger, A.
    Schmid, U.
    Schneider, M.
    Brenner, W.
    Wanzenboeck, H.
    Volland, B.
    Ivanov, Tzv.
    Rangelow, I. W.
    MICROSYSTEM TECHNOLOGIES-MICRO-AND NANOSYSTEMS-INFORMATION STORAGE AND PROCESSING SYSTEMS, 2010, 16 (11): : 1901 - 1908
12345