Algorithms and Systems of Machine Vision in Integrated Circuit Manufacturing Technology

The work describes the algorithms and software design of machine-vision systems for controlling the critical parameters in the manufacture of integrated circuits. The advantages of the chosen design are presented. Its utility for solving the problems of microcircuit image analysis on automatic topology control equipment is considered. The described design of the software complex makes it possible to identify defects efficiently, which is especially important for the development of software for the submicron VLSI topology-control equipment. The results are used at the leading electronic engineering enterprise of the Republic of Belarus, OAO Planar, which is engaged in the development and delivery of specialized technological equipment for implementing technologies in microelectronics.