Electron beam induced patterns in Ag/GeS4

The results of a systematic study of the formation of patterns by an electron beam in GeS4 are reported, A scanned electron beam has been shown to induce the dissolution of silver into the chalcogenide matrix in the irradiated areas. The dissolution produces an expansion of the material in the irradiated region that is believed to be due to the fact that the density of the reaction product is less than the average density of the silver and chalcogenide layers [11]. Once the chemical reaction was completed, no further migration of silver towards the irradiated area was observed in the Ag/GeS4 thin films.