In-situ synchrotron x-ray studies of the microstructure and stability of In2O3 epitaxial films

被引：8

作者：

Highland, M. J. ^{[1
]}

Hruszkewycz, S. O. ^{[1
]}

Fong, D. D. ^{[1
]}

Thompson, Carol ^{[2
]}

Fuoss, P. H. ^{[1
]}

Calvo-Almazan, I. ^{[1
]}

Maddali, S. ^{[1
]}

Ulvestad, A. ^{[1
]}

Nazaretski, E. ^{[3
]}

Huang, X. ^{[3
]}

Yan, H. ^{[3
]}

Chu, Y. S. ^{[3
]}

Zhou, H. ^{[4
]}

Baldo, P. M. ^{[1
]}

Eastman, J. A. ^{[1
]}

机构：

[1] Argonne Natl Lab, Mat Sci Div, Argonne, IL 60439 USA

[2] Northern Illinois Univ, Dept Phys, De Kalb, IL 60115 USA

[3] Brookhaven Natl Lab, Natl Synchrotron Light Source 2, Upton, NY 11973 USA

[4] Argonne Natl Lab, Xray Sci Div, Argonne, IL 60439 USA

来源：

APPLIED PHYSICS LETTERS | 2017年 / 111卷 / 16期

关键词：

GROWTH;

D O I：

10.1063/1.4997773

中图分类号：

O59 [应用物理学];

学科分类号：

摘要：

We report on the synthesis, stability, and local structure of In2O3 thin films grown via rf-magnetron sputtering and characterized by in-situ x-ray scattering and focused x-ray nanodiffraction. We find that In2O3 deposited onto (0 0 1)-oriented single crystal yttria-stabilized zirconia substrates adopts a Stranski-Krastanov growth mode at a temperature of 850 degrees C, resulting in epitaxial, truncated square pyramids with (1 1 1) side walls. We find that at this temperature, the pyramids evaporate unless they are stabilized by a low flux of In2O3 from the magnetron source. We also find that the internal lattice structure of one such pyramid is made up of differently strained volumes, revealing local structural heterogeneity that may impact the properties of In2O3 nanostructures and films. Published by AIP Publishing.

引用

页数：5

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