A new grid-type electron filter for volume-production negative-ion source

被引：11

作者：

Rafalskyi, D. V. ^{[1
]}

Dudin, S. V. ^{[2
]}

机构：

[1] Sci Ctr Phys Technol, UA-61108 Kharkov, Ukraine

[2] Kharkov Natl Univ, Dept Phys & Technol, UA-61108 Kharkov, Ukraine

来源：

EPL | 2012年 / 97卷 / 05期

关键词：

EXTRACTION; PLASMAS;

D O I：

10.1209/0295-5075/97/55001

中图分类号：

O4 [物理学];

学科分类号：

0702 ;

摘要：

A new system providing continuous generation of broad negative-ion beam is described and characterized. The key element of the system is the grid-type electron filter allowing the formation without magnetic field of a stationary highly electronegative plasma which can be biased negatively with respect to a relatively high-area electrode that allows to extract the negative ions. Measurements of negative-ion energy distribution functions conducted using a magnetically filtered energy analyzer show broad (250mm) negative-ion beam formation with controllable energy starting from several eV. A conclusion is made about the possibility of practical application of the grid-type electron filter in negative ion sources for electric propulsion and etching technologies. Copyright (C) EPLA, 2012

引用

页数：5

共 50 条

[41] EMITTANCE CALCULATIONS AND MEASUREMENTS FOR A SPUTTER-TYPE NEGATIVE-ION SOURCE
BILLEN, JH
NUCLEAR INSTRUMENTS & METHODS IN PHYSICS RESEARCH SECTION A-ACCELERATORS SPECTROMETERS DETECTORS AND ASSOCIATED EQUIPMENT, 1984, 220 (2-3): : 225 - 250
[42] EXPERIMENTS ON A REFLEX-TYPE SHEET PLASMA NEGATIVE-ION SOURCE
ANDO, A
KURODA, T
OKA, Y
KANEKO, O
KARITA, A
KAWAMOTO, T
REVIEW OF SCIENTIFIC INSTRUMENTS, 1990, 61 (01): : 442 - 444
[43] CALCULATED AND MEASURED EMITTANCE OF A SPUTTER-TYPE NEGATIVE-ION SOURCE
BILLEN, JH
IEEE TRANSACTIONS ON NUCLEAR SCIENCE, 1983, 30 (02) : 1495 - 1498
[44] Optimization of plasma grid material in cesium-seeded volume negative-ion sources
Kashiwagi, M
Morishita, T
Okumura, Y
Taniguchi, M
Hanada, M
Watanabe, K
Krylov, A
REVIEW OF SCIENTIFIC INSTRUMENTS, 2002, 73 (02): : 964 - 966
[45] NEGATIVE-ION PRODUCTION BY SECONDARY ELECTRONS IN A MASS-SPECTROMETER ION-SOURCE
MCALLISTER, T
JOURNAL OF THE CHEMICAL SOCIETY-CHEMICAL COMMUNICATIONS, 1972, (04) : 245 - +
[46] Enhancement of pure volume negative ion production using a grid bias method or a magnetic filter method
Jyobira, Yasuhiro
Ito, Daisuke
Fukumasa, Osamu
REVIEW OF SCIENTIFIC INSTRUMENTS, 2008, 79 (02):
[47] Photodetachment diagnostics of a volume production type negative ion source with a diode-laser
Matsuda, Y.
Kasuya, T.
Takahashi, H.
Wada, M.
Nishiura, M.
REVIEW OF SCIENTIFIC INSTRUMENTS, 2008, 79 (02):
[48] Extraction of molecular negative-ion beams of CN from radio frequency plasma-sputter-type heavy negative ion source for negative-ion beam deposition
Tsuji, H
Ishikawa, J
Tomita, T
Yoshihara, T
Gotoh, Y
REVIEW OF SCIENTIFIC INSTRUMENTS, 1998, 69 (02): : 884 - 886
[49] Low-Pressure Small-Radius Hydrogen Discharge as a Volume-Production Based Source of Negative Ions
Paunska, Tsvetelina V.
Shivarova, Antonia P.
Tarnev, Khristo Ts.
SECOND INTERNATIONAL SYMPOSIUM ON NEGATIVE IONS, BEAMS AND SOURCES, 2011, 1390
[50] 2-DIMENSIONAL PARTICLE SIMULATION OF NEGATIVE-ION EXTRACTION FROM A VOLUME SOURCE
NAITOU, H
FUKUMASA, O
SAKACHOU, K
MUTOU, K
FUSION ENGINEERING AND DESIGN, 1995, 26 (1-4) : 523 - 528

← 1 2 3 4 5 →