2-DIMENSIONAL PARTICLE SIMULATION OF NEGATIVE-ION EXTRACTION FROM A VOLUME SOURCE

Two-dimensional electrostatic particle simulation was done to study the extraction of negative ions from a volume plasma source. The simulation model is a rectangular system which consists of an extraction grid, a plasma grid, and a grounded wall. Full dynamics of electrons, ions, and negative ions are followed. Negative ions are extracted from the plasma region to the extraction grid through a slit in the plasma grid. For the lower value of extraction grid potential, the simulation results agree with the Child-Langumuir law, where the extracted negative ion current is proportional to the three-halves power of the potential of the extraction grid. For the higher value of extraction grid potential, the space charge effect of negative ions, which enter into the beamline at the top of the concavity of the positive ion boundary, reduces the negative ion current from the prediction of the Child-Langumuir law.