A volume negative-ion source for ion-beam machines

被引：4
|
作者：
Litvinov, P [1 ]
Baturin, V [1 ]
机构：
[1] Natl Acad Sci Ukraine, Inst Appl Phys, UA-244030 Sumy, Ukraine
来源：
NUCLEAR INSTRUMENTS & METHODS IN PHYSICS RESEARCH SECTION B-BEAM INTERACTIONS WITH MATERIALS AND ATOMS | 2000年 / 171卷 / 04期
关键词：
D O I：
10.1016/S0168-583X(00)00323-2
中图分类号：
TH7 [仪器、仪表];
学科分类号：
0804 ; 080401 ; 081102 ;
摘要：
This paper describes a plasma source generating negative gas ion beams of square cross-section. The source produces negative ions without using alkali metal vapors, which can migrate into the vacuum chamber affecting the samples to be treated. The performance data obtained in experiments with the source are the following: the H- ion current is similar to 60 mA; the impurity ion content in the beam is below 3%. The performance data of the ion source permit it to be employed in vacuum ion-beam equipment. (C) 2000 Elsevier Science B.V. All rights reserved.
引用
收藏
页码：573 / 576
页数：4
相关论文
共 50 条
  • [1] Prototype negative-ion sources for radioactive ion-beam generation
    Alton, GD
    Welton, RF
    Williams, C
    Cui, B
    Murray, SN
    REVIEW OF SCIENTIFIC INSTRUMENTS, 1998, 69 (06): : 2313 - 2319
  • [2] Prototype negative-ion sources for radioactive ion-beam generation
    Rev Sci Instrum, 6 (2313):
  • [3] NEGATIVE-ION SOURCE (NIABNIS) AND PREPARATION OF TRANSPARENT CARBON-FILMS BY NEGATIVE CARBON ION-BEAM DEPOSITION
    ISHIKAWA, J
    OGAWA, K
    MIYATA, K
    TSUJI, H
    TAKAGI, T
    NUCLEAR INSTRUMENTS & METHODS IN PHYSICS RESEARCH SECTION B-BEAM INTERACTIONS WITH MATERIALS AND ATOMS, 1987, 21 (2-4): : 205 - 208
  • [4] NEGATIVE-ION SOURCE AND BEAM DEVELOPMENT AT BNL
    LAM, C
    GROSSMAN, M
    KOVARIK, V
    LARSON, R
    MCKENZIEWILSON, R
    PRELEC, K
    SLUYTERS, T
    IEEE TRANSACTIONS ON NUCLEAR SCIENCE, 1979, 26 (01) : 1527 - 1529
  • [5] NEGATIVE-ION SOURCE AND BEAM DEVELOPMENT AT BNL
    LAM, C
    SLUYTERS, T
    PRELEC, K
    GROSSMAN, M
    KOVARIK, V
    LARSON, R
    MCKENZIEWILSON, R
    BULLETIN OF THE AMERICAN PHYSICAL SOCIETY, 1978, 23 (08): : 1052 - 1052
  • [6] CHARACTERISTICS OF THE NEGATIVE-ION BEAM EXTRACTED FROM AN LBL MULTICUSP VOLUME SOURCE
    DEBIAK, TW
    SOLENSTEN, L
    SREDNIAWSKI, JJ
    NG, YC
    HEUER, R
    REVIEW OF SCIENTIFIC INSTRUMENTS, 1990, 61 (01): : 392 - 394
  • [7] Development of a large volume negative-ion source for ITER neutral beam injector
    Watanabe, K
    Amemiya, T
    Hanada, M
    Iga, T
    Imai, T
    Inoue, T
    Kashiwagi, M
    Kuriyama, M
    Morishita, T
    Okumura, Y
    Takayanagi, T
    Yamamoto, T
    REVIEW OF SCIENTIFIC INSTRUMENTS, 2002, 73 (02): : 1090 - 1092
  • [8] NEGATIVE-ION SOURCE
    GOLUBEV, VP
    NALIVAIK.GA
    TSEPAKIN, SG
    PRIBORY I TEKHNIKA EKSPERIMENTA, 1974, (05): : 30 - 32
  • [9] PROGRESS IN DEVELOPING A VOLUME HYDROGEN NEGATIVE-ION SOURCE
    BACAL, M
    HILLION, F
    NACHMAN, M
    STECKELMACHER, W
    AIP CONFERENCE PROCEEDINGS, 1984, (111) : 418 - 428
  • [10] Beam optics optimization of a negative-ion sputter source
    F Osswald
    R Rebmeister
    Pramana, 2002, 59 : 795 - 804
12345