A volume negative-ion source for ion-beam machines

被引：4
|
作者：
Litvinov, P [1 ]
Baturin, V [1 ]
机构：
[1] Natl Acad Sci Ukraine, Inst Appl Phys, UA-244030 Sumy, Ukraine
来源：
NUCLEAR INSTRUMENTS & METHODS IN PHYSICS RESEARCH SECTION B-BEAM INTERACTIONS WITH MATERIALS AND ATOMS | 2000年 / 171卷 / 04期
关键词：
D O I：
10.1016/S0168-583X(00)00323-2
中图分类号：
TH7 [仪器、仪表];
学科分类号：
0804 ; 080401 ; 081102 ;
摘要：
This paper describes a plasma source generating negative gas ion beams of square cross-section. The source produces negative ions without using alkali metal vapors, which can migrate into the vacuum chamber affecting the samples to be treated. The performance data obtained in experiments with the source are the following: the H- ion current is similar to 60 mA; the impurity ion content in the beam is below 3%. The performance data of the ion source permit it to be employed in vacuum ion-beam equipment. (C) 2000 Elsevier Science B.V. All rights reserved.
引用
收藏
页码：573 / 576
页数：4
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