A new grid-type electron filter for volume-production negative-ion source

被引：11

作者：

Rafalskyi, D. V. ^{[1
]}

Dudin, S. V. ^{[2
]}

机构：

[1] Sci Ctr Phys Technol, UA-61108 Kharkov, Ukraine

[2] Kharkov Natl Univ, Dept Phys & Technol, UA-61108 Kharkov, Ukraine

来源：

EPL | 2012年 / 97卷 / 05期

关键词：

EXTRACTION; PLASMAS;

D O I：

10.1209/0295-5075/97/55001

中图分类号：

O4 [物理学];

学科分类号：

0702 ;

摘要：

A new system providing continuous generation of broad negative-ion beam is described and characterized. The key element of the system is the grid-type electron filter allowing the formation without magnetic field of a stationary highly electronegative plasma which can be biased negatively with respect to a relatively high-area electrode that allows to extract the negative ions. Measurements of negative-ion energy distribution functions conducted using a magnetically filtered energy analyzer show broad (250mm) negative-ion beam formation with controllable energy starting from several eV. A conclusion is made about the possibility of practical application of the grid-type electron filter in negative ion sources for electric propulsion and etching technologies. Copyright (C) EPLA, 2012

引用

页数：5

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