共 50 条
- [46] PREPARATIVE SOLID-STATE CHEMISTRY IN LOW-PRESSURE PLASMAS [J]. CHIMIA, 1980, 34 (12) : 489 - 501
- [47] Gas-phase nucleation in low-pressure silane plasmas [J]. FUNDAMENTAL GAS-PHASE AND SURFACE CHEMISTRY OF VAPOR-PHASE DEPOSITION II AND PROCESS CONTROL, DIAGNOSTICS, AND MODELING IN SEMICONDUCTOR MANFACTURING IV, 2001, 2001 (13): : 481 - 487
- [48] Low-pressure hydrogen plasmas explored using a global model [J]. PLASMA SOURCES SCIENCE & TECHNOLOGY, 2016, 25 (01):
- [49] DEPOSITION OF POLYMER-FILMS IN LOW-PRESSURE REACTIVE PLASMAS [J]. THIN SOLID FILMS, 1981, 86 (2-3) : 125 - 135
- [50] Low-pressure switching plasmas stabilized by an axial magnetic field [J]. ISDEIV: XVIIITH INTERNATIONAL SYMPOSIUM ON DISCHARGES AND ELECTRICAL INSULATION IN VACUUM - PROCEEDINGS, VOLS 1 AND 2, 1998, 18 : 427 - 430