DEPTH SELECTIVE ANALYSIS OF BURIED SEMICONDUCTOR LAYERS USING X-RAY GRAZING INCIDENCE DIFFRACTION.

被引:0
|
作者
Pietsch, U. [1 ]
Rose, D. [1 ]
机构
[1] Univ Potsdam, Inst Solid State Phys, Potsdam, Germany
关键词
D O I
10.1107/S0108767396080634
中图分类号
O6 [化学];
学科分类号
0703 ;
摘要
MS12.03.06
引用
收藏
页码:C472 / C472
页数:1
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