Measurements of ionization and attachment coefficients in 0.468 % and 4.910% c-C4F8/Ar mixtures and pure c-C4F8

被引:17
|
作者
Yamaji, M [1 ]
Nakamura, Y [1 ]
Morokuma, Y [1 ]
机构
[1] Keio Univ, Fac Sci & Technol, Yokohama, Kanagawa 2238522, Japan
关键词
D O I
10.1088/0022-3727/37/3/021
中图分类号
O59 [应用物理学];
学科分类号
摘要
We measured the density normalized ionization coefficients and attachment coefficients in diluted c-C4F8/Ar mixtures and in pure perfluorocyclobutane (c-C4F8) by the steady-state Townsend method. The ionization coefficients in the mixture gas are almost equal to those in pure argon at the high E/N range but differ considerably at the low E/N range. The present coefficients in pure c-C4F8 agree well with previously reported values at the high E/N range, but there are significant differences at the low E/N range. Measurements in the low E/N range were difficult, and there are few data of the attachment coefficients.
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页码:432 / 437
页数:6
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