Fabrication of a soft x-ray microscope mirror using an epoxy replication method

An x-ray microscope is a useful tool in medicine and biology. The performance of an x-ray microscope critically depends on its x-ray optics. In this paper, a Wolter typed x-ray mirror is considered for biological applications. It was fabricated using an epoxy replication method. Fabrication tolerances (figure error and surface roughness) of the soft x-ray mirror were examined. A master mandrel was prepared using single-point diamond turning and polishing, and a mirror with axial symmetry was successfully manufactured by coating of a parting agent, epoxy molding, and separation steps. The replicated mirror showed 1.4-nm rms surface roughness and 160-nm peak-to-valley (and 34.3-nm rms) figure error. Several mirrors were manufactured from only one master mandrel. (C) 2008 Society of Photo-Optical Instrumentation Engineers.