Thick-film temperature sensors and LTCC substrates - Evaluation and characterization

被引:0
|
作者
Hrovat, Marko [1 ]
Belavic, Darko [2 ]
Kita, Jaroslaw [3 ]
Holc, Janez [1 ]
Cilensek, Jena [1 ]
Golonka, Leszek [4 ]
Dziedzic, Andrzej [4 ]
机构
[1] Jozef Stefan Inst, Jamova 39, Ljubljana 1000, Slovenia
[2] HIPOT R&D, Sentjemej 8310, Slovakia
[3] Univ Bayreuth, D-95440 Bayreuth, Germany
[4] Wroclaw Univ Technol, PL-50370 Wroclaw, Poland
关键词
D O I
10.1109/ISSE.2007.4432822
中图分类号
TM [电工技术]; TN [电子技术、通信技术];
学科分类号
0808 ; 0809 ;
摘要
The electrical and microstructural characteristics of 1 kohm/sq. thick-film thermistors with high positive (PTC) and negative (NTC) temperature coefficients of resistivity (TCR) fired on "green" LTCC (Low-Temperature Cofired Ceramics) substrates were evaluated Electrical characteristics, Le., sheet resistivities, TCRs and noise indices were measured Microstructures of thick-films were investigated by scanning electron microscopy (SEM and analysed by Energy Dispersive X-ray analysis (EDS). Functional phases in thermistors were determined by X-ray powder diffraction analysis. Obtained results were compared with characteristics of thick film thermistors fired on relatively inert alumina substrates which were used as a reference.
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页码:65 / +
页数:2
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