Characterisation of thick-film resistors as gauge sensors on different LTCC substrates

被引：0
|
作者：
Hrovat, Marko [1 ,2 ]
Belavic, Darko [1 ,2 ,3 ]
Makarovic, Kostja [1 ,2 ]
Cilensek, Jena [1 ,2 ]
Malic, Barbara [1 ,2 ]
机构：
[1] Jozef Stefan Inst, Ljubljana, Slovenia
[2] CoE NAMASTE, Ljubljana, Slovenia
[3] HIPOT RR Doo, Otocec, Slovenia
来源：
INFORMACIJE MIDEM-JOURNAL OF MICROELECTRONICS ELECTRONIC COMPONENTS AND MATERIALS | 2014年 / 44卷 / 01期
关键词：
thick film resistors; LTCC; X-Ray diffraction; micro-structures; RUTHENIUM; GLASS;
D O I：
暂无
中图分类号：
TM [电工技术]; TN [电子技术、通信技术];
学科分类号：
0808 ; 0809 ;
摘要：
A thick-film resistor can sense mechanical deformations in C-MEMS structures. The relatively low elastic moduli of LTCC ceramics, compared to alumina ceramics, would suggest an increased sensitivity of the sensing elements. Selected thick-film resistors (Du Pont 2041 and ESL 3414) were evaluated as piezo-resistors for force sensors. The resistors were screen printed and fired on various LTCC tapes (Du Pont 951, ESL 41020, Heraeus HL 2000, Ferro L8 and Heraeus CT 702) as well as on alumina substrates. The LTCC tapes were analysed by scanning electron microscopy, energy-dispersive X-ray analysis and X-ray powder analysis. The crystalline phases in the LTCC materials were determined. E electrical characteristics, i.e., sheet resistivities, noise indices and gauge factors of the thick film resistors, were measured. While there were variations in the other electrical characteristics of the resistors fired on different substrates, the gauge factors were rather independent of the substrate materials
引用
收藏
页码：6 / 13
页数：8
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