Photonic crystal light-emitting diodes fabricated by microsphere lithography

被引:50
|
作者
Ng, W. N. [1 ]
Leung, C. H. [1 ]
Lai, P. T. [1 ]
Choi, H. W. [1 ]
机构
[1] Univ Hong Kong, Dept Elect & Elect Engn, Hong Kong, Hong Kong, Peoples R China
关键词
D O I
10.1088/0957-4484/19/25/255302
中图分类号
TB3 [工程材料学];
学科分类号
0805 ; 080502 ;
摘要
Instead of using conventional electron lithography, a two-dimensional photonic crystal consisting of a hexagonal array of triangular air-holes was created on the surface of a GaN LED substrate using microsphere lithography. The microspheres self-assemble into a single-layered hexagonal-close-packed array acting as an etch mask. A significant enhancement in photoluminescence intensity was recorded from the PhC LED structure. A twofold increase in electroluminescence was observed from the PhC LED compared to an as-grown LED with identical geometry. Besides geometrical factors due to surface roughening, the dispersive nature of PhCs and diffractive properties of the PhC as a grating contribute to the enhancement of light extraction from the LED.
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页数:5
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