Sub-micron structuring of solid targets with femtosecond laser pulses

被引：0
|
作者：
Korte, F [1 ]
Nolte, S [1 ]
Chichkov, BN [1 ]
Fallnich, C [1 ]
Tünnermann, A [1 ]
Welling, H [1 ]
机构：
[1] Laser Zentrum Hannover EV, D-30419 Hannover, Germany
来源：
LASER APPLICATIONS IN MICROELECTRONIC AND OPTOELECTRONIC MANUFACTURING VI | 2001年 / 4274卷
关键词：
ultrafast lasers; microstructure fabrication;
D O I：
10.1117/12.432502
中图分类号：
T [工业技术];
学科分类号：
08 ;
摘要：
Possibilities to fabricate sub-micron structures in thin metal films, metal coatings, and glass substrates using femtosecond laser pulses are systematically studied. Structures are produced by direct femtosecond-pulse laser ablation of solid targets at atmospheric pressure. Tight focusing and imaging techniques are applied. Dependencies of the structure size on laser pulse energy and pulse number are investigated.
引用
收藏
页码：110 / 115
页数：2
相关论文
共 50 条
  • [11] Sub-micron ablation of metallic thin film by femtosecond pulse laser
    Venkatakrishnan, K
    Tan, B
    Sivakumar, NR
    OPTICS AND LASER TECHNOLOGY, 2002, 34 (07): : 575 - 578
  • [12] Absorption of femtosecond laser pulses in interaction with solid targets
    Dong, QL
    Zhang, J
    Teng, H
    PHYSICAL REVIEW E, 2001, 64 (02): : 6 - 264116
  • [13] NANORIM: SUB-MICRON STRUCTURING WITH REACTION INJECTION MOLDING
    Shafagh, Reza Zandi
    van der Wijngaart, Wouter
    Haraldsson, Tommy
    30TH IEEE INTERNATIONAL CONFERENCE ON MICRO ELECTRO MECHANICAL SYSTEMS (MEMS 2017), 2017, : 213 - 216
  • [14] An optoelectronic device in bulk LiF with sub-micron periodic gratings fabricated by interference of 400 nm femtosecond laser pulses
    Kurobori, T.
    Obayashi, Y.
    Kurashima, M.
    Hirose, Y.
    Sakai, T.
    Aoshima, S.
    Kojima, T.
    Okuda, S.
    NUCLEAR INSTRUMENTS & METHODS IN PHYSICS RESEARCH SECTION B-BEAM INTERACTIONS WITH MATERIALS AND ATOMS, 2008, 266 (12-13): : 2762 - 2765
  • [15] Sub-micron periodic structuring of sapphire by laser induced backside wet etching technique
    Pissadakis, Stavros
    Boehme, Rico
    Zimmer, Klaus
    OPTICS EXPRESS, 2007, 15 (04): : 1428 - 1433
  • [16] Ultraviolet femtosecond pulses: Key technology for sub-micron machining and efficient XUV pulse generation
    P. Simon
    J. Bekesi
    C. Dölle
    J.-H. Klein-Wiele
    G. Marowsky
    S. Szatmari
    B. Wellegehausen
    Applied Physics B, 2002, 74 : s189 - s192
  • [17] Ultraviolet femtosecond pulses:: Key technology for sub-micron machining and efficient XUV pulse generation
    Simon, P
    Bekesi, J
    Dölle, C
    Klein-Wiele, JH
    Marowsky, G
    Szatmari, S
    Wellegehausen, B
    APPLIED PHYSICS B-LASERS AND OPTICS, 2002, 74 (Suppl 1): : S189 - S192
  • [18] Sub-wavelength surface structuring of NiTi alloy by femtosecond laser pulses
    Yang Yang
    Jianjun Yang
    Chunyong Liang
    Hongshui Wang
    Xiaonong Zhu
    Dengfeng Kuang
    Yong Yang
    Applied Physics A, 2008, 92 : 635 - 642
  • [19] Sub-wavelength surface structuring of NiTi alloy by femtosecond laser pulses
    Yang, Yang
    Yang, Jianjun
    Liang, Chunyong
    Wang, Hongshui
    Zhu, Xiaonong
    Kuang, Dengfeng
    Yang, Yong
    APPLIED PHYSICS A-MATERIALS SCIENCE & PROCESSING, 2008, 92 (03): : 635 - 642
  • [20] Sub-wavelength surface structuring on stainless steel by femtosecond laser pulses
    Qi, Litao
    Hu, Jinping
    Lin, Haipeng
    Xing, Hualu
    INTERNATIONAL SYMPOSIUM ON OPTOELECTRONIC TECHNOLOGY AND APPLICATION 2014: LASER MATERIALS PROCESSING; AND MICRO/NANO TECHNOLOGIES, 2014, 9295
12345