Investigation of a Piezoelectric Driven MEMS Mirror based on Single S-shaped PZT Actuator

被引：2

作者：

Koh, Kah How ^{[1
]}

Kobayashi, Takeshi ^{[2
]}

Liu, Huicong ^{[1
]}

Lee, Chengkuo ^{[1
]}

机构：

[1] Natl Univ Singapore, Dept Elect & Comp Engn, Engn Dr 3, Singapore 117576, Singapore

[2] Natl Inst Adv Ind Sci & Technol, Tsukuba, Ibaraki 3058564, Japan

来源：

EUROSENSORS XXV | 2011年 / 25卷

关键词：

Micro-electro-mechanical systems (MEMS); Optical MEMS; Piezoelectric actuator; PZT;

D O I：

10.1016/j.proeng.2011.12.173

中图分类号：

TH7 [仪器、仪表];

学科分类号：

0804 ; 080401 ; 081102 ;

摘要：

A silicon micromirror driven by a single S-shaped piezoelectric actuator has been demonstrated for 2-D scanning mirror applications. A large mirror (1.65mm x 2mm) and an S-shaped PZT actuator are formed after the fabrication process. Three modes of operation are investigated: bending, torsional and mixed. The resonant frequencies obtained for bending and torsional modes are 27Hz and 70Hz respectively. The maximum measured optical deflection angles obtained at 1V(pp) are +/- 7.26 degrees and +/- 1.18 degrees respectively for bending and torsional modes. Various 2-D Lissajous patterns are demonstrated by superimposing two ac sinusoidal electrical signals of different frequencies (27Hz and 70Hz) into one signal to be used to actuate the mirror. (C) 2011 Published by Elsevier Ltd.

引用

页数：4

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