Growing carbon nanotubes by microwave plasma-enhanced chemical vapor deposition

被引：155
|
作者：
Qin, LC
Zhou, D
Krauss, AR
Gruen, DM
机构：
[1] Argonne Natl Lab, Div Mat Sci, Argonne, IL 60439 USA
[2] Argonne Natl Lab, Div Chem, Argonne, IL 60439 USA
来源：
APPLIED PHYSICS LETTERS | 1998年 / 72卷 / 26期
关键词：
D O I：
10.1063/1.121658
中图分类号：
O59 [应用物理学];
学科分类号：
摘要：
A processing route has been developed to grow bundles of carbon nanotubes on substrates from methane and hydrogen mixtures by microwave plasma-enhanced chemical vapor deposition, catalyzed by iron particles reduced from ferric nitrate. Growth takes place at about 900 degrees C leading to nanotubes with lengths of more than 20 mu m and diameters on the nanometer scale. (C) 1998 American Institute of Physics.
引用
收藏
页码：3437 / 3439
页数：3
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