A hierarchical approach to production control of reentrant semiconductor manufacturing lines

被引:51
|
作者
Vargas-Villamil, FD
Rivera, DE
Kempf, KG
机构
[1] Inst Mexicano Petr, Programe Math Aplicadas & Comp, Mexico City 07730, DF, Mexico
[2] Arizona State Univ, Inst Mfg Enterprise Syst, Control Syst Engn Lab, Tempe, AZ 85287 USA
[3] Arizona State Univ, Dept Chem & Mat Engn, Tempe, AZ 85287 USA
[4] Intel Corp, Decis Technol, Technol & Mfg Grp, Chandler, AZ 85226 USA
关键词
discrete-event system; hierarchical structure; model predictive control (MPC); reentrant manufacturing line; scheduling; semiconductor fabrication;
D O I
10.1109/TCST.2003.813368
中图分类号
TP [自动化技术、计算机技术];
学科分类号
0812 ;
摘要
A three-layer hierarchical approach for inventory control and production optimization of semiconductor reentrant manufacturing, lines is developed. At the top layer, the parameters of an aggregated model are obtained on-line while, at the intermediate layer, production optimization and inventory control via model predictive control are performed. The aim of these two layers is aggregated (or averaged) supervisory control. The bottom layer consists of a distributed control policy,which issues discrete-event decisions to track the aggregated targets, issued by the optimizer. This layer accomplishes shop-floor control. The algorithm is applied to a discrete-event manufacturing line problem developed by Intel Corporation, which captures the main challenges posed by reentrant manufacturing lines.
引用
收藏
页码:578 / 587
页数:10
相关论文
共 50 条
  • [31] Simulation of hierarchical manufacturing control
    Karacal, SC
    COMPUTERS & INDUSTRIAL ENGINEERING, 1998, 35 (1-2) : 339 - 342
  • [32] Control of lithography in semiconductor manufacturing
    Martinez, Victor M.
    Edgar, Thomas F.
    IEEE CONTROL SYSTEMS MAGAZINE, 2006, 26 (06): : 46 - 55
  • [33] Robust run-to-run control for semiconductor manufacturing: An internal model control approach
    Adivikolanu, S
    Zafiriou, E
    PROCEEDINGS OF THE 1998 AMERICAN CONTROL CONFERENCE, VOLS 1-6, 1998, : 3687 - 3691
  • [34] Modeling with hierarchical Petri net of semiconductor manufacturing system
    Huang, D
    Yan, JW
    Qiao, F
    2004 8TH INTERNATIONAL CONFERENCE ON CONTROL, AUTOMATION, ROBOTICS AND VISION, VOLS 1-3, 2004, : 2217 - 2222
  • [35] FABMAS:: An agent-based system for production control of semiconductor manufacturing processes
    Mönch, L
    Stehli, M
    Zimmermann, J
    HOLONIC AND MULTI-AGENT SYSTEMS FOR MANUFACTURING, 2003, 2744 : 258 - 267
  • [36] Quality Control for Ultrafiltration of Ultrapure Water Production for High End Semiconductor Manufacturing
    Ruth, Jochen
    Berndt, Rolf
    2016 27TH ANNUAL SEMI ADVANCED SEMICONDUCTOR MANUFACTURING CONFERENCE (ASMC), 2016, : 16 - 22
  • [37] Translating overall production goals into distributed flow control parameters for semiconductor manufacturing
    Hu, MD
    Chang, SC
    JOURNAL OF MANUFACTURING SYSTEMS, 2003, 22 (01) : 46 - 63
  • [38] A quota-constrained, speed control model for production scheduling in semiconductor manufacturing
    Liao, Da-Yin
    Tsai, Min-Yi
    International Journal of Manufacturing Technology and Management, 2006, 9 (3-4) : 294 - 308
  • [39] Production and inventory control model of semiconductor manufacturing based on moving average method
    Liu, Yang
    Dai, Min
    Zhang, Zhi-Sheng
    Shi, Jin-Fei
    Jisuanji Jicheng Zhizao Xitong/Computer Integrated Manufacturing Systems, CIMS, 2010, 16 (02): : 324 - 330
  • [40] SIMULATION FOR CONTROL OF MANUFACTURING LINES
    CHAPPAZ, E
    GIAMBIASI, N
    MASSOTTE, P
    FELDMANN, G
    ANTONSANTI, P
    SIMULATION APPLIED TO MANUFACTURING ENERGY AND ENVIRONMENTAL STUDIES AND ELECTRONICS AND COMPUTER ENGINEERING, 1989, : 128 - 133