Modeling with hierarchical Petri net of semiconductor manufacturing system

被引：0
|
作者：
Huang, D [1 ]
Yan, JW [1 ]
Qiao, F [1 ]
机构：
[1] Tongji Univ, CIMS Res Ctr, Shanghai 200092, Peoples R China
来源：
2004 8TH INTERNATIONAL CONFERENCE ON CONTROL, AUTOMATION, ROBOTICS AND VISION, VOLS 1-3 | 2004年
关键词：
Petri nets; modeling; semiconductor manufacturing;
D O I：
暂无
中图分类号：
TP [自动化技术、计算机技术];
学科分类号：
0812 ;
摘要：
A new kind of hierarchical Petri net (HPN) and its modeling approach for semiconductor manufacturing system are presented in this paper. Firstly, the applications of Petri nets in semiconductor manufacturing system are briefly reviewed. Then the definition of HPN and its modeling procedure are given. Finally, an application-oriented case study is illustrated.
引用
收藏
页码：2217 / 2222
页数：6
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