A hierarchical approach to production control of reentrant semiconductor manufacturing lines

被引:51
|
作者
Vargas-Villamil, FD
Rivera, DE
Kempf, KG
机构
[1] Inst Mexicano Petr, Programe Math Aplicadas & Comp, Mexico City 07730, DF, Mexico
[2] Arizona State Univ, Inst Mfg Enterprise Syst, Control Syst Engn Lab, Tempe, AZ 85287 USA
[3] Arizona State Univ, Dept Chem & Mat Engn, Tempe, AZ 85287 USA
[4] Intel Corp, Decis Technol, Technol & Mfg Grp, Chandler, AZ 85226 USA
关键词
discrete-event system; hierarchical structure; model predictive control (MPC); reentrant manufacturing line; scheduling; semiconductor fabrication;
D O I
10.1109/TCST.2003.813368
中图分类号
TP [自动化技术、计算机技术];
学科分类号
0812 ;
摘要
A three-layer hierarchical approach for inventory control and production optimization of semiconductor reentrant manufacturing, lines is developed. At the top layer, the parameters of an aggregated model are obtained on-line while, at the intermediate layer, production optimization and inventory control via model predictive control are performed. The aim of these two layers is aggregated (or averaged) supervisory control. The bottom layer consists of a distributed control policy,which issues discrete-event decisions to track the aggregated targets, issued by the optimizer. This layer accomplishes shop-floor control. The algorithm is applied to a discrete-event manufacturing line problem developed by Intel Corporation, which captures the main challenges posed by reentrant manufacturing lines.
引用
收藏
页码:578 / 587
页数:10
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