Technology breakthrough by ferroelectric HfO2 for low power logic and memory applications

被引:1
|
作者
Kobayashi, Masaharu [1 ]
机构
[1] Univ Tokyo, Inst Ind Sci, Tokyo 1538505, Japan
关键词
D O I
10.1149/08602.0021ecst
中图分类号
O646 [电化学、电解、磁化学];
学科分类号
081704 ;
摘要
Internet-of-Things (IoT) edge device has been playing key roles as an intelligent sensor node device. The number of IoT devices will become trillions or even more, which requires low power and energy-efficient integrated device solutions. Ferroelectric HfO2 has been recently discovered and expected to open new paths for the integrated devices. In this paper, we introduce logic and memory applications: (1) Negative capacitance FET as a CMOS logic technology booster, (2) Nonvolatile SRAM as a power management tool, and (3) Ferroelectric tunnel junction as a novel analog memory for neuromorphic computing.
引用
收藏
页码:21 / 25
页数:5
相关论文
共 50 条
  • [41] A low power memristor based on Lu doped HfO2 ferroelectric thin films and its multifunctional realization
    Yan, Xiaobing
    Bai, Jiahao
    Zhang, Yinxing
    Wang, Hong
    Zhao, Jianhui
    Zhou, Zhenyu
    Sun, Yong
    Wang, Zhongrong
    Guo, Zhenqiang
    Zhao, Zhen
    Niu, Jiangzhen
    MATERIALS TODAY NANO, 2024, 25
  • [42] High-Speed and Low-Power Ferroelectric HfO2 /ZrO2 Superlattice FinFET Memory Device Using AlON Interfacial Layer
    Wei, Chen-You
    Huang, Ming-Yueh
    Yan, Siao-Cheng
    Wu, Yung-Chun
    IEEE TRANSACTIONS ON ELECTRON DEVICES, 2024, 71 (06) : 3977 - 3980
  • [43] Recent Progress and Applications of HfO2-Based Ferroelectric Memory
    Liu, Xiao
    Geng, Xiangshun
    Liu, Houfang
    Shao, Minghao
    Zhao, Ruiting
    Yang, Yi
    Ren, Tian-Ling
    TSINGHUA SCIENCE AND TECHNOLOGY, 2023, 28 (02): : 221 - 229
  • [44] Nonvolatile reconfigurable sequential logic in a HfO2 resistive random access memory array
    Zhou, Ya-Xiong
    Li, Yi
    Su, Yu-Ting
    Wang, Zhuo-Rui
    Shih, Ling-Yi
    Chang, Ting-Chang
    Chang, Kuan-Chang
    Long, Shi-Bing
    Sze, Simon M.
    Miao, Xiang-Shui
    NANOSCALE, 2017, 9 (20) : 6649 - 6657
  • [45] Reliability Study of Ferroelectric Al:HfO2 Thin Films for DRAM and NAND Applications
    Florent, Karine
    Lavizzari, Simone
    Di Piazza, Luca
    Popovici, Mihaela
    Duan, Jingyu
    Groeseneken, Guido
    Van Houdt, Jan
    IEEE TRANSACTIONS ON ELECTRON DEVICES, 2017, 64 (10) : 4091 - 4098
  • [46] Dual Ferroelectric Stack of HfZrO2 /Al:HfO2 With Tunable Coercive Voltage for High-Density Memory Applications
    Jeong, Jiae
    Park, Hyoungjin
    Kim, Nayeon
    Kim, Hyun Wook
    Hong, Eunryeong
    Choi, Hyeonsik
    Jeon, Seonuk
    Kim, Yunsur
    Woo, Jiyong
    IEEE TRANSACTIONS ON ELECTRON DEVICES, 2024, 71 (06) : 3981 - 3984
  • [47] A Nonvolatile SRAM Based on Ferroelectric HfO2 capacitor for IoT Power Management (Invited)
    Kobayashi, Masaharu
    Ueyama, Nozomu
    Hiramoto, Toshiro
    SILICON COMPATIBLE MATERIALS, PROCESSES, AND TECHNOLOGIES FOR ADVANCED INTEGRATED CIRCUITS AND EMERGING APPLICATIONS 8, 2018, 85 (06): : 111 - 114
  • [48] Disentangling stress and strain effects in ferroelectric HfO2
    Song, Tingfeng
    Lenzi, Veniero
    Silva, Jose P. B.
    Marques, Luis
    Fina, Ignasi
    Sanchez, Florencio
    APPLIED PHYSICS REVIEWS, 2023, 10 (04)
  • [49] Ferroelectric phase stabilization of HfO2 by nitrogen doping
    Xu, Lun
    Nishimura, Tomonori
    Shibayama, Shigehisa
    Yajima, Takeaki
    Migita, Shinji
    Toriumi, Akira
    APPLIED PHYSICS EXPRESS, 2016, 9 (09)
  • [50] Spin Hall effect in doped ferroelectric HfO2
    Zhang, Qin
    Chen, Xu
    Yu, Yue
    Li, Huinan
    Dou, Mingbo
    Gurung, G.
    Wang, Xianjie
    Tao, L. L.
    APPLIED PHYSICS LETTERS, 2024, 125 (03)