Technology breakthrough by ferroelectric HfO2 for low power logic and memory applications

被引:1
|
作者
Kobayashi, Masaharu [1 ]
机构
[1] Univ Tokyo, Inst Ind Sci, Tokyo 1538505, Japan
关键词
D O I
10.1149/08602.0021ecst
中图分类号
O646 [电化学、电解、磁化学];
学科分类号
081704 ;
摘要
Internet-of-Things (IoT) edge device has been playing key roles as an intelligent sensor node device. The number of IoT devices will become trillions or even more, which requires low power and energy-efficient integrated device solutions. Ferroelectric HfO2 has been recently discovered and expected to open new paths for the integrated devices. In this paper, we introduce logic and memory applications: (1) Negative capacitance FET as a CMOS logic technology booster, (2) Nonvolatile SRAM as a power management tool, and (3) Ferroelectric tunnel junction as a novel analog memory for neuromorphic computing.
引用
收藏
页码:21 / 25
页数:5
相关论文
共 50 条
  • [1] Technology Breakthrough by Ferroelectric HfO2 for Ultralow Power Logic and Memory
    Kobayashi, Masaharu
    2017 FIFTH BERKELEY SYMPOSIUM ON ENERGY EFFICIENT ELECTRONIC SYSTEMS & STEEP TRANSISTORS WORKSHOP (E3S), 2017,
  • [2] Ferroelectric-HfO2 Devices Technology and Manufacturing for Memory and Logic Applications
    Migita, Shinji
    2020 IEEE ELECTRON DEVICES TECHNOLOGY AND MANUFACTURING CONFERENCE (EDTM 2020), 2020,
  • [3] The fundamentals and applications of ferroelectric HfO2
    Uwe Schroeder
    Min Hyuk Park
    Thomas Mikolajick
    Cheol Seong Hwang
    Nature Reviews Materials, 2022, 7 : 653 - 669
  • [4] Reliability Characteristics of Ferroelectric Si: HfO2 Thin Films for Memory Applications
    Mueller, Stefan
    Mueller, Johannes
    Schroeder, Uwe
    Mikolajick, Thomas
    IEEE TRANSACTIONS ON DEVICE AND MATERIALS RELIABILITY, 2013, 13 (01) : 93 - 97
  • [5] Ferroelectric HfO2 and its Impact on the Memory Landscape
    Mueller, Stefan
    2018 IEEE 10TH INTERNATIONAL MEMORY WORKSHOP (IMW), 2018, : 12 - 15
  • [6] Publisher Correction: The fundamentals and applications of ferroelectric HfO2
    Uwe Schroeder
    Min Hyuk Park
    Thomas Mikolajick
    Cheol Seong Hwang
    Nature Reviews Materials, 2022, 7 (8) : 670 - 670
  • [7] Impact of mechanical strain on wakeup of HfO2 ferroelectric memory
    Kruv, A.
    McMitchell, S. R. C.
    Clima, S.
    Okudur, O. O.
    Ronchi, N.
    Van den Bosch, G.
    Gonzalez, M.
    De Wolf, I
    Van Houdt, J.
    2021 IEEE INTERNATIONAL RELIABILITY PHYSICS SYMPOSIUM (IRPS), 2021,
  • [8] Defects in ferroelectric HfO2
    Chouprik, Anastasia
    Negrov, Dmitrii
    Tsymbal, Evgeny Y.
    Zenkevich, Andrei
    NANOSCALE, 2021, 13 (27) : 11635 - 11678
  • [9] HfO2-based Ferroelectric Devices for Low Power Applications
    Huang, Qianqian
    Yang, Mengxuan
    Luo, Jin
    Su, Chang
    Huang, Ru
    6TH IEEE ELECTRON DEVICES TECHNOLOGY AND MANUFACTURING CONFERENCE (EDTM 2022), 2022, : 285 - 287
  • [10] Uniting The Trinity of Ferroelectric HfO2 Memory Devices in a Single Memory Cell
    Slesazeck, Stefan
    Havel, Viktor
    Breyer, Evelyn
    Mulaosmanovic, Halid
    Hoffmann, Michael
    Max, Benjamin
    Duenkel, Stefan
    Mikolajick, Thomas
    2019 IEEE 11TH INTERNATIONAL MEMORY WORKSHOP (IMW 2019), 2019, : 20 - 23