Impact of Oxygen Plasma Treatment on the Device Performance of Zinc Oxide Nanoparticle-Based Thin-Film Transistors

被引：68
|
作者：
Faber, Hendrik [1 ]
Hirschmann, Johannes [1 ]
Klaumuenzer, Martin [2 ]
Braunschweig, Bjoern [2 ]
Peukert, Wolfgang [2 ]
Halik, Marcus [1 ]
机构：
[1] Univ Erlangen Nurnberg, OMD, Dept Mat Sci, D-91058 Erlangen, Germany
[2] Univ Erlangen Nurnberg, Dept Chem & Biol Engn, Inst Particle Technol, D-91058 Erlangen, Germany
来源：
ACS APPLIED MATERIALS & INTERFACES | 2012年 / 4卷 / 03期
关键词：
zinc oxide; nanoparticles; plasma treatment; thin-film transistors; SUM-FREQUENCY GENERATION; ZNO NANOPARTICLES; GREEN LUMINESCENCE; LOW-TEMPERATURE; GROWTH; PHOTOLUMINESCENCE; NANOSTRUCTURES; CRYSTALS; NANORODS;
D O I：
10.1021/am2018223
中图分类号：
TB3 [工程材料学];
学科分类号：
0805 ; 080502 ;
摘要：
Thin-films of zinc oxide nanoparticles were investigated by photoluminescence spectroscopy and a broad defect-related yellow-green emission was observed. Oxygen plasma treatment was applied in order to reduce the number of defects, and the emission intensity was quenched to 4% of the initial value. Thin-film transistors that incorporate the nanoparticles as active semiconducting layers show an improved device performance after oxygen plasma treatment. The maximum drain current and the charge carrier mobility increased more than 1 order of magnitude up to a nominal value of 23 cm(2) V-(1) s(-1) and the threshold voltage was lowered.
引用
收藏
页码：1693 / 1696
页数：4
相关论文
共 50 条
  • [1] Morphological impact of zinc oxide layers on the device performance in thin-film transistors
    Faber, Hendrik
    Klaumuenzer, Martin
    Voigt, Michael
    Galli, Diana
    Vieweg, Benito F.
    Peukert, Wolfgang
    Spiecker, Erdmann
    Halik, Marcus
    NANOSCALE, 2011, 3 (03) : 897 - 899
  • [2] Mechanical deformation on nanoparticle-based thin-film transistors
    Vidor, Fabio F.
    Meyers, Thorsten
    Reker, Julia
    Mueller, Kathrin
    Wirth, Gilson I.
    Hilleringmann, Ulrich
    FIFTH CONFERENCE ON SENSORS, MEMS, AND ELECTRO-OPTIC SYSTEMS, 2019, 11043
  • [3] Solution-processed ZnO nanoparticle-based semiconductor oxide thin-film transistors
    Lee, Sul
    Jeong, Youngmin
    Jeong, Sunho
    Lee, Jisu
    Jeon, Minhyon
    Moon, Jooho
    SUPERLATTICES AND MICROSTRUCTURES, 2008, 44 (06) : 761 - 769
  • [4] Oxygen Plasma Functioning of Charge Carrier Density in Zinc Oxide Thin-Film Transistors
    Chu, Min-Ching
    Meena, Jagan Singh
    Liu, Po-Tsun
    Shieh, Han-Ping D.
    You, Hsin-Chiang
    Tu, Yen-Wei
    Chang, Feng-Chih
    Ko, Fu-Hsiang
    APPLIED PHYSICS EXPRESS, 2013, 6 (07)
  • [5] Zinc oxide thin-film transistors
    Fortunato, E
    Barquinha, P
    Pimentel, A
    Gonçalves, A
    Marques, A
    Pereira, L
    Martins, R
    ZINC OXIDE - A MATERIAL FOR MICRO- AND OPTOELECTRONIC APPLICATIONS, 2005, 194 : 225 - 238
  • [6] Improvements in the device characteristics of amorphous indium gallium zinc oxide thin-film transistors by Ar plasma treatment
    Park, Jin-Seong
    Jeong, Jae Kyeong
    Mo, Yeon-Gon
    Kim, Hye Dong
    Kim, Sun-Il
    APPLIED PHYSICS LETTERS, 2007, 90 (26)
  • [7] Reduction of Hysteresis in HgSe Nanoparticle-Based Thin-Film Transistors Using Blocking Oxide Layers on Plastics
    Yun, Junggwon
    Cho, Kyoungah
    Kim, Sangsig
    JOURNAL OF NANOSCIENCE AND NANOTECHNOLOGY, 2011, 11 (07) : 6114 - 6117
  • [8] Time Domain Electrical Characterization in Zinc Oxide Nanoparticle Thin-Film Transistors
    Becker, Thales E.
    Vidor, Fabio F.
    Wirth, Gilson I.
    Meyers, Thorsten
    Reker, Julia
    Hilleringmann, Ulrich
    2018 IEEE 19TH LATIN-AMERICAN TEST SYMPOSIUM (LATS), 2018,
  • [9] Characteristics of Plasma-Fluorinated Zinc Oxide Thin-Film Transistors
    Ye, Zhi
    Wong, Man
    IEEE ELECTRON DEVICE LETTERS, 2012, 33 (08) : 1147 - 1149
  • [10] Oxide Thin-Film Transistors: Device Physics
    Wager, John F.
    Yeh, Bao
    OXIDE SEMICONDUCTORS, 2013, 88 : 283 - 315
12345