Innovative surface acoustic wave sensor for accurate measurement of subatmospheric pressure

被引：20
|
作者：
Nicolay, P. [1 ]
Elmazria, O. [1 ]
Sarry, F. [1 ]
Bouvot, L. [1 ]
Marche, N. [1 ]
Kambara, H. [2 ]
机构：
[1] Nancy Univ, Lab Phys Milieux Ionises & Applicat, CNRS, UMR 7040, F-54506 Vandoeuvre Les Nancy, France
[2] ALCATEL Vacuum Technol France, ADIXEN, F-74009 Annecy, France
来源：
APPLIED PHYSICS LETTERS | 2008年 / 92卷 / 14期
关键词：
D O I：
10.1063/1.2908038
中图分类号：
O59 [应用物理学];
学科分类号：
摘要：
An original application for surface acoustic wave (SAW) subatmospheric pressure sensor was developed to measure pressure below 100 mTorr with very high precision. The basic operating principles and the most significant experimental results of the sensor are presented here. A simple theoretical model is proposed. This sensor provides an efficient measuring solution in a wide range of subatmospheric pressure, which has been inaccessible in past by conventional diaphragm-based SAW sensors. (C) 2008 American Institute of Physics.
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页数：2
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