Surface-Acoustic-Wave Sensor Design for Acceleration Measurement

被引：18

作者：

Shevchenko, Sergey ^{[1
]}

Kukaev, Alexander ^{[1
]}

Khivrich, Maria ^{[1
]}

Lukyanov, Dmitry ^{[1
]}

机构：

[1] St Petersburg Electrotech Univ, Dept Laser Measurement & Nav Syst, Prof Popova 5, St Petersburg 197376, Russia

来源：

SENSORS | 2018年 / 18卷 / 07期

关键词：

microaccelerometer; surface acoustic waves (SAWs); interdigital transducer (IDT); quartz packaging;

D O I：

10.3390/s18072301

中图分类号：

O65 [分析化学];

学科分类号：

070302 ; 081704 ;

摘要：

We suggest a concept design of a SAW-based microaccelerometer with an original triangular-shaped console-type sensing element. Our design is particularly optimized to increase the robustness against positioning errors of the SAW resonators on the opposite sides of the console. We also describe the results of computer simulations and laboratory tests that are in a perfect agreement with each other and present the sensitivity characteristics of a manufactured experimental design device.

引用

页数：11

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